Design and fabrication of a rotary comb-actuated microgripper with high driving efficiency

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 1145-1148

  Chang, Honglong ^a,b   Zhao, Haitao ^a   Xie, Jianbing ^a   Hao, Yongcun ^a   Zhang, Feng ^a   Yuan, Weizheng ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMB ACTUATOR; CONVERSION SYSTEMS; DRIVING VOLTAGES; MICROGRIPPER; ROTATIONAL MOTION; STRUCTURAL LAYERS; TARGET OBJECT;

EFFICIENCY; MEMS;

GRIPPERS;

EID: 84860438439     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170365     Document Type: Conference Paper

References (5)

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