Deep sub-micron stud-via technology of superconductor VLSI circuits

Superconductor Science and Technology

Volumn 27, Issue 2, 2014, Pages

  Tolpygo, Sergey K ^a   Bolkhovsky, V ^a   Weir, T ^a   Johnson, L M ^a   Oliver, W D ^a   Gouker, M A ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Josephson junctions; Nb films; Nb Al AlOx Nb tunnel junctions; single flux quantum circuits; superconducting critical current; superconductor integrated circuits

Indexed keywords

JOSEPHSON; NB FILM; SINGLE FLUX QUANTUM CIRCUIT; SUPERCONDUCTING CRITICAL CURRENT; SUPERCONDUCTOR INTEGRATED CIRCUIT;

ELECTRIC PROPERTIES; FABRICATION; PHOTOLITHOGRAPHY; STUDS (FASTENERS); STUDS (STRUCTURAL MEMBERS); SUPERCONDUCTING MATERIALS; VLSI CIRCUITS;

SUPERCONDUCTIVITY;

EID: 84892569775     PISSN: 09532048     EISSN: 13616668     Source Type: Journal    
DOI: 10.1088/0953-2048/27/2/025016     Document Type: Article

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