Development of advanced Nb process for SFQ circuits

Physica C: Superconductivity and its Applications

Volumn 412-414, Issue SPEC. ISS., 2004, Pages 1429-1436

  Nagasawa, S ^a   Hinode, K ^a   Satoh, T ^a   Akaike, H ^a   Kitagawa, Y ^a   Hidaka, M ^a  

^a SUPERCONDUCTIVITY RESEARCH LABORATORY   (Japan)

Author keywords

Nb fabrication process; Planarization; SFQ circuits; Superconducting LSI

Indexed keywords

CIRCUIT THEORY; ELECTRIC INSULATORS; LSI CIRCUITS; MULTILAYERS; POLISHING; QUANTUM ELECTRONICS; REACTIVE ION ETCHING; RESISTORS; SPUTTERING; SUPERCONDUCTING DEVICES;

MECHANICAL POLISHING PLANARIZATION (MPP); NB FABRICATION PROCESSES; REVERSE MASKS; SINGLE FLUX QUANTUM (SFQ) CIRCUITS;

NIOBIUM;

EID: 4644352910     PISSN: 09214534     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physc.2003.12.097     Document Type: Conference Paper

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