Improvements in fabrication process for Nb-based single flux quantum circuits in japan

IEICE Transactions on Electronics

Volumn E91-C, Issue 3, 2008, Pages 318-324

  Hidaka, Mutsuo ^a   Nagasawa, Shuichi ^a   Hinode, Kenji ^a   Satoh, Tetsuro ^a  

^a SUPERCONDUCTIVITY RESEARCH LABORATORY   (Japan)

Author keywords

Fabrication process; Josephson junction; Nb AlO.r Nb junction; SFQ (Single Flu.x Quantum) circuit; Superconductive circuit

Indexed keywords

CROSSBAR EQUIPMENT; JOSEPHSON JUNCTION DEVICES; MOLLUSCS; QUANTUM OPTICS; RANDOM ACCESS STORAGE; SHELLFISH; SHIFT REGISTERS; SUPERCONDUCTING FILMS; TIMING CIRCUITS;

ADVANCED PROCESS; FABRICATION PROCESS; GOVERNMENT PROJECTS; INTEGRATION LEVELS; JOSEPHSON-JUNCTION; PROCESS STEPS; SINGLE FLUX QUANTUM CIRCUIT; SUPERCONDUCTIVE CIRCUITS;

FABRICATION;

EID: 48849101730     PISSN: 09168524     EISSN: 17451353     Source Type: Journal    
DOI: 10.1093/ietele/e91-c.3.318     Document Type: Article

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