New Nb multi-layer fabrication process for large-scale SFQ circuits

Physica C: Superconductivity and its Applications

Volumn 469, Issue 15-20, 2009, Pages 1578-1584

  Nagasawa, S ^a,d   Satoh, T ^a,d   Hinode, K ^a,d   Kitagawa, Y ^a,d   Hidaka, M ^a,d   Akaike, H ^b,d   Fujimaki, A ^b,d   Takagi, K ^b,d   Takagi, N ^b,d   Yoshikawa, N ^c,d  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

^c YOKOHAMA NATIONAL UNIVERSITY   (Japan)

^d JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Fabrication process; Niobium; Planarization; SFQ circuits; Shift register; Superconductivity

Indexed keywords

ACTIVE LAYER; BIT-SHIFTS; DC POWER; DEVICE STRUCTURES; FABRICATION PROCESS; FABRICATION SEQUENCE; NB JUNCTIONS; PLANARIZATION; SFQ CIRCUIT; SFQ CIRCUITS; TEST ELEMENTS; TEST PATTERN;

MAGNETIC FIELDS; NIOBIUM; SHIFT REGISTERS; SQUIDS; SUPERCONDUCTIVITY;

FABRICATION;

EID: 68249088147     PISSN: 09214534     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physc.2009.05.219     Document Type: Article

References (22)

1. Hinode K., Nagasawa S., Sugita M., Satoh T., Akaike H., Kitagawa Y., and Hidaka M. IEICE Trans. Electron. E86-C (2003) 2511
2. Nagasawa S., Hinode K., Sugita M., Satoh T., Akaike H., Kitagawa Y., and Hidaka M. Supercond. Sci. Technol. 16 (2003) 1483
3. Nagasawa S., Hinode K., Satoh T., Akaike H., Kitagawa Y., and Hidaka M. Physica C 412-414 (2004) 1429
4. Satoh T., Hinode K., Akaike H., Kitagawa Y., Nagasawa S., and Hidaka M. Physica C 412-414 (2004) 1447
5. Akaike H., Kitagawa Y., Satoh T., Hinode K., Nagasawa S., and Hidaka M. Physica C 412-414 (2004) 1442
6. Hinode K., Nagasawa S., Sugita M., Satoh T., Akaike H., Kitagawa Y., and Hidaka M. Physica C 412-414 (2004) 1437
7. Nagasawa S., Hinode K., Satoh T., Akaike H., Kitagawa Y., and Hidaka M. Physica C 426-431 (2005) 1525
8. Hinode K., Satoh T., Nagasawa S., Kitagawa Y., and Hidaka M. Physica C 426-431 (2005) 1533
9. Satoh T., Hinode H., Akaike H., Nagasawa S., Kitagawa Y., and Hidaka M. Physica C 445-448 (2006) 937
10. Hidaka M., Nagasawa S., Satoh T., Hinode K., and Kitagawa Y. Supercond. Sci. Technol. 19 (2006) 1483
11. Satoh T., Hinode K., Nagasawa S., Kitagawa Y., and Hidaka M. IEEE Trans. Appl. Supercond. 17 (2007) S138
12. Akaike H., Yamada T., Fujimaki A., Nagasawa S., Satoh T., Hinode K., Kitagawa Y., and Hidaka M. Supercond. Sci. Technol. 19 (2006) S320
13. Nagasawa S., Satoh T., Hinode K., Kitagawa Y., and Hidaka M. IEEE Trans. Appl. Supercond. 17 (2007) 177
14. Honda H., Kataoka H., Mehedipour F., Inoue K., and Murakami K. Proc. Superconducting SFQ VLSI Workshop (SSV2008) (2008) 41
15. Nagasawa S., Satoh T., Hinode K., Kitagawa Y., Hidaka M., Akaike H., Fujimaki A., Takagi K., Takagi N., and Yoshikawa N. Proc. Superconducting SFQ VLSI Workshop (SSV2008) (2008) 5
16. "Low-power, high-performance, reconfigurable processor using single flux quantum circuits," Japan Science and Technology Agency's CREST program.
17. T. Satoh, K. Hinode, S. Nagasawa, Y. Kitagawa, M. Hidaka, N. Yoshikawa, H. Akaike, A. Fujimaki, K. Takagi, N. Takagi, IEEE Trans. Appl. Supercond. (accepted for publication).
18. Akaike H., Fujimaki A., Satoh T., Hinode K., Nagasawa S., Kitagawa Y., and Hidaka M. IEEE Trans. Appl. Supercond. 17 (2007) 466
19. K. Fujiwara, S. Nagasawa, Y. Hashimoto, M. Hidaka, N. Yoshikawa, M. Tanaka, H. Akaike, A. Fujimaki, K. Takagi, N. Takagi, IEEE Trans. Appl. Supercond. (accepted for publication).
20. Numata H., and Tahara S. IEICE Trans. Electron. 84-C (2001) 2
21. Tolpygo S.K., Amparo D., Kirichenko A., and Yohannes D. Supercond. Sci. Technol. 20 (2007) S341
22. Hinode K., Satoh T., Nagasawa S., and Hidaka M. J. Appl. Phys. 104 (2008) 023909