X-ray nanofocusing using a piezoelectric deformable mirror and at-wavelength metrology methods

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 710, Issue , 2013, Pages 93-97

  Nakamori, Hiroki ^a   Matsuyama, Satoshi ^a   Imai, Shota ^a   Kimura, Takashi ^b   Sano, Yasuhisa ^a   Kohmura, Yoshiki ^c   Tamasaku, Kenji ^c   Yabashi, Makina ^c   Ishikawa, Tetsuya ^c   Yamauchi, Kazuto ^a  

^a OSAKA UNIVERSITY   (Japan)

^b HOKKAIDO UNIVERSITY   (Japan)

^c RIKEN SPring 8 Center   (Japan)

Author keywords

Deformable mirror; Hard X ray focusing

Indexed keywords

DEFORMATION; MIRRORS;

AT-WAVELENGTH METROLOGIES; DEFORMABLE MIRRORS; DIFFRACTION LIMITED; FOCUSING PERFORMANCE; HARD-X-RAY FOCUSING; PENCIL BEAM METHOD; SHAPE CONTROLLABILITY; SPATIAL WAVELENGTHS;

ADAPTIVE OPTICS;

EID: 84891837528     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2012.11.059     Document Type: Article

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