Design and characterization of mechanically-coupled CMOS-MEMS filters

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Volumn , Issue , 2013, Pages 2288-2291

  Chen, Chao Yu ^a   Li, Ming Huang ^a   Li, Cheng Syun ^a   Li, Sheng Shian ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

CMOS MEMS; filter termination; mechanical filter; narrow bandwidth

Indexed keywords

ADVANCED DESIGN SYSTEM; CMOS-MEMS; DE-EMBEDDING TECHNIQUES; FILTER TERMINATION; MECHANICAL FILTERS; MOTIONAL IMPEDANCE; NARROW BANDWIDTH; TERMINATION RESISTANCE;

ACTUATORS; ELECTROMECHANICAL FILTERS; MICROSYSTEMS; SOLID-STATE SENSORS;

DESIGN;

EID: 84891690708     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/Transducers.2013.6627262     Document Type: Conference Paper

References (12)

1. C. T.-C. Nguyen, "MEMS technology for timing?,"IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol.54, no. 2, pp. 251-270, 2007.
2. J. Adut, et al., "A 10.7-MHz sixth-order SC ladderfilter?," IEEE Transactions on circuits and systems I:Regular Papers, vol. 53, no. 8, pp. 1625-1635, 2006.
3. F. D. Bannon III, et al., "High-Q HFmicroelectromechanical filters," IEEE J. Solid-StateCircuits, vol. 35, no. 4, pp. 512-526, 2000.
4. S.-S. Li, et al., "An MSI micromechanical differentialdisk-array filter," Transducers'07, pp. 307-311, 2007.
5. C. Zuo, et al., "Very high frequency channel-selectMEMS filters?," Sensor and Actuators A, 160,132-140, 2010.
6. W. Pan, et al., "A low-loss 1.8GHz monolithicthin-film ?," MEMS'08, pp. 176-179.
7. G. K. Fedder, "CMOS-MEMS resonant mixer-filter,"IEDM'05, pp. 274-277.
8. J. Lopez, et al., "A CMOS-MEMS RF-tunable?,"IEEE Electron Device Letters, vol. 30, no. 7, 2009.
9. W.-C. Chen, et al., "A generalizedCMOS-MEMS?," J. Micromechanics andMicroengineering, vol. 21, no. 6, 065012, June 2011.
10. M.-H. Li, et al., "Mechanically coupled?," IEEETrans. Ultrason., Ferroelect., Freq. Contr., vol. 59,no. 3, pp. 346-357, Mar. 2012.
11. D. Galayko, et al., "High-frequency high-Qmicro-mechanical?," MEMS'02, pp. 665-668.
12. K. Wang, et al., "High-order?," J. Microelectromech. Syst., vol. 8, no. 4, pp. 534-557, 1999.