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Volumn 14, Issue 3, 2014, Pages 312-317

Tuning of ripple patterns and wetting dynamics of Si (100) surface using ion beam irradiation

Author keywords

AFM; Contact angle; RBS; Ripple; Roughness; SEM

Indexed keywords

AFM; DYNAMICAL EVOLUTION; ION BEAM IRRADIATION; ION-BEAM SPUTTERING; NEAR SURFACE REGIONS; RBS; RIPPLE; STYLUS PROFILOMETER;

EID: 84891608725     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2013.12.007     Document Type: Article
Times cited : (30)

References (34)
  • 1
    • 84861019673 scopus 로고    scopus 로고
    • Enhanced lithographic imaging layer meets semiconductor manufacturing specification a decade early
    • Y.C. Tseng, A.U. Mane, J.W. Elam, and S.B. Darling Enhanced lithographic imaging layer meets semiconductor manufacturing specification a decade early Adv. Mater. 24 2012 2608 2613
    • (2012) Adv. Mater. , vol.24 , pp. 2608-2613
    • Tseng, Y.C.1    Mane, A.U.2    Elam, J.W.3    Darling, S.B.4
  • 2
    • 84863952562 scopus 로고    scopus 로고
    • Triangular elastomeric stamps for optical applications: Near-field phase shift photolithography, 3D proximity field patterning, embossed antireflective coatings, and SERS sensing
    • A.M. Bowen, M.J. Motala, J.M. Lucas, S. Gupta, A.J. Baca, A. Mihi, A.P. Alivisatos, P.V. Braun, and R.G. Nuzzo Triangular elastomeric stamps for optical applications: near-field phase shift photolithography, 3D proximity field patterning, embossed antireflective coatings, and SERS sensing Adv. Funct. Mater. 22 2012 2927 2938
    • (2012) Adv. Funct. Mater. , vol.22 , pp. 2927-2938
    • Bowen, A.M.1    Motala, M.J.2    Lucas, J.M.3    Gupta, S.4    Baca, A.J.5    Mihi, A.6    Alivisatos, A.P.7    Braun, P.V.8    Nuzzo, R.G.9
  • 4
    • 29144458220 scopus 로고    scopus 로고
    • Lateral templating for guided self-organization of sputter morphologies
    • DOI 10.1002/adma.200500717
    • A. Cuenat, H.B. George, K.C. Chang, J.M. Blakely, and M.J. Aziz Lateral templating for guided self-organization of sputter morphologies Adv. Mater. 17 2005 2845 2849 (Pubitemid 41797809)
    • (2005) Advanced Materials , vol.17 , Issue.23 , pp. 2845-2849
    • Cuenat, A.1    George, H.B.2    Chang, K.-C.3    Blakely, J.M.4    Aziz, M.J.5
  • 5
    • 20944447208 scopus 로고    scopus 로고
    • Surface nanostructuring by nano-/femtosecond laser-assisted scanning force microscopy
    • A. Chimmalgi, C.P. Grigoropoulos, and K. Komvopoulos Surface nanostructuring by nano-/femtosecond laser-assisted scanning force microscopy J. Appl. Phys. 97 1-12 2005 104319
    • (2005) J. Appl. Phys. , vol.97 , Issue.112 , pp. 104319
    • Chimmalgi, A.1    Grigoropoulos, C.P.2    Komvopoulos, K.3
  • 6
    • 0033520486 scopus 로고    scopus 로고
    • Formation of ordered nanoscale semiconductor dots by ion sputtering
    • DOI 10.1126/science.285.5433.1551
    • S. Facsko, T. Dekorsy, C. Koerdt, C. Trappe, H. Kurz, A. Vogt, and H.L. Hartnagel Formation of ordered nanoscale semiconductor dots by ion sputtering Science 285 1999 1551 1553 (Pubitemid 29420576)
    • (1999) Science , vol.285 , Issue.5433 , pp. 1551-1553
    • Facsko, S.1    Dekorsy, T.2    Koerdt, C.3    Trappe, C.4    Kurz, H.5    Vogt, A.6    Hartnagel, H.L.7
  • 7
    • 84883290633 scopus 로고    scopus 로고
    • Fabrication of ordered ripple patterns on GaAs (100) surface using 60 keV Ar+ beam irradiation
    • T. Kumar, M. Kumar, S. Verma, and D. Kanjilal Fabrication of ordered ripple patterns on GaAs (100) surface using 60 keV Ar+ beam irradiation Surf. Eng. 29 2013 543 546
    • (2013) Surf. Eng. , vol.29 , pp. 543-546
    • Kumar, T.1    Kumar, M.2    Verma, S.3    Kanjilal, D.4
  • 8
    • 84870975144 scopus 로고    scopus 로고
    • Role of surface composition in morphological evolution of GaAs nano-dots with low-energy ion irradiation
    • T. Kumar, M. Kumar, G. Gupta, R.K. Pandey, S. Verma, and D. Kanjilal Role of surface composition in morphological evolution of GaAs nano-dots with low-energy ion irradiation Nanoscale Res. Lett. 552 7 2012 1 8
    • (2012) Nanoscale Res. Lett. , vol.552 , Issue.7 , pp. 1-8
    • Kumar, T.1    Kumar, M.2    Gupta, G.3    Pandey, R.K.4    Verma, S.5    Kanjilal, D.6
  • 10
    • 0034319951 scopus 로고    scopus 로고
    • Roughness evolution of ion sputtered rotating InP surfaces: Pattern formation and scaling laws
    • DOI 10.1103/PhysRevLett.85.4116
    • F. Frost, A. Schindler, and F. Bigl Roughness evolution of ion sputtered rotating InP surfaces: pattern formation and scaling laws Phys. Rev. Lett. 85 2000 4116 4119 (Pubitemid 32020581)
    • (2000) Physical Review Letters , vol.85 , Issue.19 , pp. 4116-4119
    • Frost, F.1    Schindler, A.2    Bigl, F.3
  • 11
    • 0032947360 scopus 로고    scopus 로고
    • Liquid morphologies on structured surfaces: From microchannels to microchips
    • DOI 10.1126/science.283.5398.46
    • H. Gau, S. Herminghaus, P. Lenz, and R. Lipowsky Liquid morphologies on structured surfaces: from microchannels to microchips Science 283 1999 46 49 (Pubitemid 29044840)
    • (1999) Science , vol.283 , Issue.5398 , pp. 46-49
    • Gau, H.1    Herminghaus, S.2    Lenz, P.3    Lipowsky, R.4
  • 12
    • 0041707797 scopus 로고    scopus 로고
    • Incomplete wetting of nanoscale thin-film structures
    • M.T. Spuller, and D.W. Hess Incomplete wetting of nanoscale thin-film structures J. Electrochem. Soc. 150 2003 G476 G480
    • (2003) J. Electrochem. Soc. , vol.150
    • Spuller, M.T.1    Hess, D.W.2
  • 13
    • 0141707937 scopus 로고    scopus 로고
    • Self-cleaning surfaces-virtual realities
    • R. Blossey Self-cleaning surfaces-virtual realities Nat. Mater. 2 2003 301 306
    • (2003) Nat. Mater. , vol.2 , pp. 301-306
    • Blossey, R.1
  • 14
    • 37549026495 scopus 로고    scopus 로고
    • The rigorous derivation of Young, Cassie-Baxter and Wenzel equations and the analysis of the contact angle hysteresis phenomenon
    • G. Whyman, E. Bormashenko, and T. Stein The rigorous derivation of Young, Cassie-Baxter and Wenzel equations and the analysis of the contact angle hysteresis phenomenon Chem. Phys. Lett. 450 2008 355 359
    • (2008) Chem. Phys. Lett. , vol.450 , pp. 355-359
    • Whyman, G.1    Bormashenko, E.2    Stein, T.3
  • 15
    • 84946547716 scopus 로고
    • Theory of ripple topography induced by ion bombardment
    • R.M. Bradley, and J.M.E. Harper Theory of ripple topography induced by ion bombardment J. Vac. Sci. Technol. A 6 1988 2390 2395
    • (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 2390-2395
    • Bradley, R.M.1    Harper, J.M.E.2
  • 16
    • 79751520437 scopus 로고    scopus 로고
    • Mass redistribution causes the structural richness of ion-irradiated surfaces
    • C.S. Madi, E. Anzenberg, K.F. Ludwig Jr., and M.J. Aziz Mass redistribution causes the structural richness of ion-irradiated surfaces Phys. Rev. Lett. 106 2011 66101
    • (2011) Phys. Rev. Lett. , vol.106 , pp. 66101
    • Madi, C.S.1    Anzenberg, E.2    Ludwig, Jr.K.F.3    Aziz, M.J.4
  • 18
    • 84883176837 scopus 로고    scopus 로고
    • Role of ion beam induced solid flow in surface patterning of Si (100) using Ar ion beam irradiation
    • T. Kumar, A. Kumar, N. Lalla, S. Hooda, S. Ojha, S. Verma, and D. Kanjilal Role of ion beam induced solid flow in surface patterning of Si (100) using Ar ion beam irradiation Appl. Surf. Sci. 283 2013 417 421
    • (2013) Appl. Surf. Sci. , vol.283 , pp. 417-421
    • Kumar, T.1    Kumar, A.2    Lalla, N.3    Hooda, S.4    Ojha, S.5    Verma, S.6    Kanjilal, D.7
  • 19
    • 84885010940 scopus 로고    scopus 로고
    • An approach to tune the amplitude of surface ripple patterns
    • T. Kumar, A. Kumar, and D. Kanjilal An approach to tune the amplitude of surface ripple patterns Appl. Phys. Lett. 103 1-3 2013 131604
    • (2013) Appl. Phys. Lett. , vol.103 , Issue.13 , pp. 131604
    • Kumar, T.1    Kumar, A.2    Kanjilal, D.3
  • 21
    • 84891601296 scopus 로고    scopus 로고
    • http://home.rzg.mpg.de/∼mam/.
  • 22
    • 0003098343 scopus 로고
    • An essay on the cohesion of fluids
    • T. Young An essay on the cohesion of fluids Philos. Trans. R. Soc. London 95 1805 65 87
    • (1805) Philos. Trans. R. Soc. London , vol.95 , pp. 65-87
    • Young, T.1
  • 23
    • 85021792427 scopus 로고
    • Resistance of solid surfaces to wetting by water
    • R.N. Wenzel Resistance of solid surfaces to wetting by water Ind. Eng. Chem. 28 1936 988 994
    • (1936) Ind. Eng. Chem. , vol.28 , pp. 988-994
    • Wenzel, R.N.1
  • 24
    • 23844542189 scopus 로고    scopus 로고
    • Roughness optimization for biomimetic superhydrophobic surfaces
    • DOI 10.1007/s00542-005-0602-9
    • M. Nosonovsky, and B. Bhushan Roughness optimization for biomimetic superhydrophobic surfaces Microsyst. Technol. 11 2005 535 549 (Pubitemid 41156262)
    • (2005) Microsystem Technologies , vol.11 , Issue.7 , pp. 535-549
    • Nosonovsky, M.1    Bhushan, B.2
  • 26
    • 84857062775 scopus 로고    scopus 로고
    • Hydrodynamic approach to surface pattern formation by ion beams
    • M. Castro, and R. Cuerno Hydrodynamic approach to surface pattern formation by ion beams Appl. Surf. Sci. 258 2012 4171 4178
    • (2012) Appl. Surf. Sci. , vol.258 , pp. 4171-4178
    • Castro, M.1    Cuerno, R.2
  • 27
    • 67349143974 scopus 로고    scopus 로고
    • Morphology of Si surfaces sputter-eroded by low-energy Xe-ions at glancing incident angle
    • K. Zhang, H. Hofsäss, F. Rotter, M. Uhrmacher, C. Ronning, and J. Krauser Morphology of Si surfaces sputter-eroded by low-energy Xe-ions at glancing incident angle Surf. Coat. Technol. 203 2009 2395 2398
    • (2009) Surf. Coat. Technol. , vol.203 , pp. 2395-2398
    • Zhang, K.1    Hofsäss, H.2    Rotter, F.3    Uhrmacher, M.4    Ronning, C.5    Krauser, J.6
  • 28
    • 34548036043 scopus 로고    scopus 로고
    • Coarsening of ion-beam-induced surface ripple in Si: Nonlinear effect vs. Geometrical shadowing
    • D.P. Datta, and T.K. Chini Coarsening of ion-beam-induced surface ripple in Si: nonlinear effect vs. geometrical shadowing Phys. Rev. B 76 2007 075323
    • (2007) Phys. Rev. B , vol.76 , pp. 075323
    • Datta, D.P.1    Chini, T.K.2
  • 29
    • 84871597190 scopus 로고    scopus 로고
    • Stress-induced solid flow drives surface nanopatterning of silicon by ion-beam irradiation
    • M. Castro, R. Gago, L. Vázquez, J. Muñoz-García, and R. Cuerno Stress-induced solid flow drives surface nanopatterning of silicon by ion-beam irradiation Phys. Rev. B 86 2012 214107
    • (2012) Phys. Rev. B , vol.86 , pp. 214107
    • Castro, M.1    Gago, R.2    Vázquez, L.3    Muñoz-García, J.4    Cuerno, R.5
  • 30
    • 84871090354 scopus 로고    scopus 로고
    • Stress-induced patterns in ion-irradiated silicon: Model based on anisotropic plastic flow
    • S.A. Norris Stress-induced patterns in ion-irradiated silicon: model based on anisotropic plastic flow Phys. Rev. B 86 2012 235405
    • (2012) Phys. Rev. B , vol.86 , pp. 235405
    • Norris, S.A.1
  • 31
    • 84891591722 scopus 로고    scopus 로고
    • http://www.srim.org/.
  • 32
    • 3643090763 scopus 로고
    • Theory of sputtering. I. Sputtering yield of amorphous and polycrystalline targets
    • P. Sigmund Theory of sputtering. I. Sputtering yield of amorphous and polycrystalline targets Phys. Rev. 184 1969 383
    • (1969) Phys. Rev. , vol.184 , pp. 383
    • Sigmund, P.1
  • 33
    • 33644545415 scopus 로고    scopus 로고
    • Nonlinear ripple dynamics on amorphous surfaces patterned by ion beam sputtering
    • J. Muñoz-García, M. Castro, and R. Cuerno Nonlinear ripple dynamics on amorphous surfaces patterned by ion beam sputtering Phys. Rev. Lett. 96 2006 086101
    • (2006) Phys. Rev. Lett. , vol.96 , pp. 086101
    • Muñoz-García, J.1    Castro, M.2    Cuerno, R.3


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