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Volumn 289, Issue , 2014, Pages 407-416

A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance

Author keywords

Lateral resolution; Oxygen isotope analysis; ToF SIMS

Indexed keywords

IONS; ISOTOPES; ORGANIC POLYMERS;

EID: 84890555820     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.10.177     Document Type: Article
Times cited : (76)

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