SCOPUS 정보 검색 플랫폼

Journal of Analytical Atomic Spectrometry

Volumn 28, Issue 7, 2013, Pages 1080-1089

A novel ToF-SIMS operation mode for improved accuracy and lateral resolution of oxygen isotope measurements on oxides

(4) Holzlechner, Gerald a Kubicek, Markus a Hutter, Herbert a Fleig, Jürgen a

a VIENNA UNIVERSITY OF TECHNOLOGY (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; DIFFUSION; IONS; OPTIMIZATION; OXYGEN; SECONDARY EMISSION; SECONDARY ION MASS SPECTROMETRY; STRONTIUM;

CHEMICAL MAPPING; DEAD TIME EFFECTS; LATERAL RESOLUTION; OXYGEN DIFFUSION COEFFICIENTS; OXYGEN ISOTOPE EXCHANGE; SIGNAL SATURATION; TIME OF FLIGHT SECONDARY ION MASS SPECTROMETRY; TOF-SIMS ANALYSIS;

ISOTOPES;

EID: 84883232931 PISSN: 02679477 EISSN: 13645544 Source Type: Journal
DOI: 10.1039/c3ja50059d Document Type: Article

Times cited : (56)

References (74)

1
- 7644237552
- S. B. Adler Chem. Rev. 2004 104 4791 4843
- (2004) Chem. Rev. , vol.104 , pp. 4791-4843
- Adler, S.B.¹

2
- 84856104127
- W. C. Chueh Y. Hao W. Jung S. M. Haile Nat. Mater. 2012 11 155 161
- (2012) Nat. Mater. , vol.11 , pp. 155-161
- Chueh, W.C.¹ Hao, Y.² Jung, W.³ Haile, S.M.⁴

3
- 84855280302
- J. L. M. Rupp Solid State Ionics 2012 207 1 13
- (2012) Solid State Ionics , vol.207 , pp. 1-13
- Rupp, J.L.M.¹

4
- 77958464032
- T. Horita T. Shimonosono H. Kishimoto K. Yamaji M. E. Brito Y. Hori H. Yokokawa Electrochem. Solid State Lett. 2010 13 B135 B138
- (2010) Electrochem. Solid State Lett. , vol.13
- Horita, T.¹ Shimonosono, T.² Kishimoto, H.³ Yamaji, K.⁴ Brito, M.E.⁵ Hori, Y.⁶ Yokokawa, H.⁷

5
- 0023295288
- J. Mizusaki K. Amano S. Yamauchi K. Fueki Solid State Ionics 1987 22 313 322
- (1987) Solid State Ionics , vol.22 , pp. 313-322
- Mizusaki, J.¹ Amano, K.² Yamauchi, S.³ Fueki, K.⁴

6
- 85016882707
- T. Horita D. Cho T. Shimonosono H. Kishimoto K. Yamaji M. E. Brito H. Yokokawa J. Electrochem. Soc. 2012 159 F476 F481
- (2012) J. Electrochem. Soc. , vol.159
- Horita, T.¹ Cho, D.² Shimonosono, T.³ Kishimoto, H.⁴ Yamaji, K.⁵ Brito, M.E.⁶ Yokokawa, H.⁷

7
- 0023291689
- J. Mizusaki K. Amano S. Yamauchi K. Fueki Solid State Ionics 1987 22 323 330
- (1987) Solid State Ionics , vol.22 , pp. 323-330
- Mizusaki, J.¹ Amano, K.² Yamauchi, S.³ Fueki, K.⁴

8
- 38649140708
- M. Sase K. Yashiro K. Sato J. Mizusaki T. Kawada N. Sakai K. Yamaji T. Horita H. Yokokawa Solid State Ionics 2008 178 1843 1852
- (2008) Solid State Ionics , vol.178 , pp. 1843-1852
- Sase, M.¹ Yashiro, K.² Sato, K.³ Mizusaki, J.⁴ Kawada, T.⁵ Sakai, N.⁶ Yamaji, K.⁷ Horita, T.⁸ Yokokawa, H.⁹

9
- 46649106550
- M. Sase F. Hermes K. Yashiro K. Sato J. Mizusaki T. Kawada N. Sakai H. Yokokawa J. Electrochem. Soc. 2008 155 B793 B797
- (2008) J. Electrochem. Soc. , vol.155
- Sase, M.¹ Hermes, F.² Yashiro, K.³ Sato, K.⁴ Mizusaki, J.⁵ Kawada, T.⁶ Sakai, N.⁷ Yokokawa, H.⁸

10
- 79960973781
- A. Chroneos B. Yildiz A. Tarancon D. Parfitt J. A. Kilner Energy Environ. Sci. 2011 4 2774 2789
- (2011) Energy Environ. Sci. , vol.4 , pp. 2774-2789
- Chroneos, A.¹ Yildiz, B.² Tarancon, A.³ Parfitt, D.⁴ Kilner, J.A.⁵

11
- 84861093856
- I. D. Seymour A. Tarancon A. Chroneos D. Parfitt J. A. Kilner R. W. Grimes Solid State Ionics 2012 216 41 43
- (2012) Solid State Ionics , vol.216 , pp. 41-43
- Seymour, I.D.¹ Tarancon, A.² Chroneos, A.³ Parfitt, D.⁴ Kilner, J.A.⁵ Grimes, R.W.⁶

12
- 56149088184
- E. Mutoro S. Gunther B. Luerssen I. Valov J. Janek Solid State Ionics 2008 179 1835 1848
- (2008) Solid State Ionics , vol.179 , pp. 1835-1848
- Mutoro, E.¹ Gunther, S.² Luerssen, B.³ Valov, I.⁴ Janek, J.⁵

13
- 84857789724
- S. Fearn J. C. H. Rossiny J. A. Kilner J. R. G. Evans Solid State Ionics 2012 211 51 57
- (2012) Solid State Ionics , vol.211 , pp. 51-57
- Fearn, S.¹ Rossiny, J.C.H.² Kilner, J.A.³ Evans, J.R.G.⁴

14
- 32044467306
- N. Sakai T. Horita K. Yamaji M. E. Brito H. Yokokawa A. Kawakami S. Matsuoka N. Watanabe A. Ueno J. Electrochem. Soc. 2006 153 A621 A625
- (2006) J. Electrochem. Soc. , vol.153
- Sakai, N.¹ Horita, T.² Yamaji, K.³ Brito, M.E.⁴ Yokokawa, H.⁵ Kawakami, A.⁶ Matsuoka, S.⁷ Watanabe, N.⁸ Ueno, A.⁹

15
- 80052028948
- D. P. Rupasov A. V. Berenov J. A. Kilner S. Y. Istomin E. V. Antipov Solid State Ionics 2011 197 18 24
- (2011) Solid State Ionics , vol.197 , pp. 18-24
- Rupasov, D.P.¹ Berenov, A.V.² Kilner, J.A.³ Istomin, S.Y.⁴ Antipov, E.V.⁵

16
- 84859125198
- Z. Cai M. Kubicek J. Fleig B. Yildiz Chem. Mater. 2012 24 1116 1127
- (2012) Chem. Mater. , vol.24 , pp. 1116-1127
- Cai, Z.¹ Kubicek, M.² Fleig, J.³ Yildiz, B.⁴

17
- 84866990942
- R. Hancke S. Fearn J. A. Kilner R. Haugsrud Phys. Chem. Chem. Phys. 2012 14 13971 13978
- (2012) Phys. Chem. Chem. Phys. , vol.14 , pp. 13971-13978
- Hancke, R.¹ Fearn, S.² Kilner, J.A.³ Haugsrud, R.⁴

18
- 43949087772
- J. Janek B. Luerssen E. Mutoro H. Fischer S. Gunther Top. Catal. 2007 44 399 407
- (2007) Top. Catal. , vol.44 , pp. 399-407
- Janek, J.¹ Luerssen, B.² Mutoro, E.³ Fischer, H.⁴ Gunther, S.⁵

19
- 79955547212
- M. Kubicek A. Limbeck T. Frömling H. Hutter J. Fleig J. Electrochem. Soc. 2011 158 B727 B734
- (2011) J. Electrochem. Soc. , vol.158
- Kubicek, M.¹ Limbeck, A.² Frömling, T.³ Hutter, H.⁴ Fleig, J.⁵

20
- 41549142324
- R. A. De Souza M. J. Pietrowski U. Anselmi-Tamburini S. Kim Z. A. Munir M. Martin Phys. Chem. Chem. Phys. 2008 10 2067 2072
- (2008) Phys. Chem. Chem. Phys. , vol.10 , pp. 2067-2072
- De Souza, R.A.¹ Pietrowski, M.J.² Anselmi-Tamburini, U.³ Kim, S.⁴ Munir, Z.A.⁵ Martin, M.⁶

21
- 83655161313
- N. J. Simrick A. Bieberle-Hutter T. M. Ryll J. A. Kilner A. Atkinson J. L. M. Rupp Solid State Ionics 2012 206 7 16
- (2012) Solid State Ionics , vol.206 , pp. 7-16
- Simrick, N.J.¹ Bieberle-Hutter, A.² Ryll, T.M.³ Kilner, J.A.⁴ Atkinson, A.⁵ Rupp, J.L.M.⁶

22
- 84872709860
- H. Aydin C. Korte M. Rohnke J. Janek Phys. Chem. Chem. Phys. 2013 15 1944 1955
- (2013) Phys. Chem. Chem. Phys. , vol.15 , pp. 1944-1955
- Aydin, H.¹ Korte, C.² Rohnke, M.³ Janek, J.⁴

23
- 34250030173
- J. L. Hertz H. L. Tuller Solid State Ionics 2007 178 915 923
- (2007) Solid State Ionics , vol.178 , pp. 915-923
- Hertz, J.L.¹ Tuller, H.L.²

24
- 84856934090
- M. Burriel J. Pena-Martinez R. J. Chater S. Fearn A. V. Berenov S. J. Skinner J. A. Kilner Chem. Mater. 2012 24 613 621
- (2012) Chem. Mater. , vol.24 , pp. 613-621
- Burriel, M.¹ Pena-Martinez, J.² Chater, R.J.³ Fearn, S.⁴ Berenov, A.V.⁵ Skinner, S.J.⁶ Kilner, J.A.⁷

25
- 77953286621
- A. K. Opitz J. Fleig Solid State Ionics 2010 181 684 693
- (2010) Solid State Ionics , vol.181 , pp. 684-693
- Opitz, A.K.¹ Fleig, J.²

26
- 77957904330
- A. Opitz A. Schintlmeister H. Hutter J. Fleig Phys. Chem. Chem. Phys. 2010 12 12734 12745
- (2010) Phys. Chem. Chem. Phys. , vol.12 , pp. 12734-12745
- Opitz, A.¹ Schintlmeister, A.² Hutter, H.³ Fleig, J.⁴

27
- 84876562581
- M. Kubicek Z. Cai W. Ma B. Yildiz H. Hutter J. Fleig ACS Nano 2013 7 3276 3286
- (2013) ACS Nano , vol.7 , pp. 3276-3286
- Kubicek, M.¹ Cai, Z.² Ma, W.³ Yildiz, B.⁴ Hutter, H.⁵ Fleig, J.⁶

28
- 79952316163
- M. Gerstl T. Frömling A. Schintlmeister H. Hutter J. Fleig Solid State Ionics 2011 184 23 26
- (2011) Solid State Ionics , vol.184 , pp. 23-26
- Gerstl, M.¹ Frömling, T.² Schintlmeister, A.³ Hutter, H.⁴ Fleig, J.⁵

29
- 0033878069
- R. A. De Souza J. A. Kilner J. F. Walker Mater. Lett. 2000 43 43 52
- (2000) Mater. Lett. , vol.43 , pp. 43-52
- De Souza, R.A.¹ Kilner, J.A.² Walker, J.F.³

30
- 84875618802
- M. Y. Oh A. Unemoto K. Amezawa T. Kawada J. Electrochem. Soc. 2012 159 F659 F664
- (2012) J. Electrochem. Soc. , vol.159
- Oh, M.Y.¹ Unemoto, A.² Amezawa, K.³ Kawada, T.⁴

31
- 84860993154
- V. B. Vert J. M. Serra J. A. Kilner M. Burriel J. Power Sources 2012 213 270 274
- (2012) J. Power Sources , vol.213 , pp. 270-274
- Vert, V.B.¹ Serra, J.M.² Kilner, J.A.³ Burriel, M.⁴

32
- 84863369246
- E. N. Coker J. A. Ohlhausen A. Ambrosini J. E. Miller J. Mater. Chem. 2012 22 6726
- (2012) J. Mater. Chem. , vol.22 , pp. 6726
- Coker, E.N.¹ Ohlhausen, J.A.² Ambrosini, A.³ Miller, J.E.⁴

33
- 84871545804
- D. Pergolesi E. Fabbri S. N. Cook V. Roddatis E. Traversa J. A. Kilner ACS Nano 2012 6 10524 10534
- (2012) ACS Nano , vol.6 , pp. 10524-10534
- Pergolesi, D.¹ Fabbri, E.² Cook, S.N.³ Roddatis, V.⁴ Traversa, E.⁵ Kilner, J.A.⁶

34
- 19944362485
- G. Y. Yang G. D. Lian E. C. Dickey C. A. Randall D. E. Barber P. Pinceloup M. A. Henderson R. A. Hill J. J. Beeson D. J. Skamser J. Appl. Phys. 2004 96 7500 7508
- (2004) J. Appl. Phys. , vol.96 , pp. 7500-7508
- Yang, G.Y.¹ Lian, G.D.² Dickey, E.C.³ Randall, C.A.⁴ Barber, D.E.⁵ Pinceloup, P.⁶ Henderson, M.A.⁷ Hill, R.A.⁸ Beeson, J.J.⁹ Skamser, D.J.¹⁰

35
- 21544439348
- H. M. Duiker P. D. Beale J. F. Scott C. A. P. Dearaujo B. M. Melnick J. D. Cuchiaro L. D. McMillan J. Appl. Phys. 1990 68 5783 5791
- (1990) J. Appl. Phys. , vol.68 , pp. 5783-5791
- Duiker, H.M.¹ Beale, P.D.² Scott, J.F.³ Dearaujo, C.A.P.⁴ Melnick, B.M.⁵ Cuchiaro, J.D.⁶ McMillan, L.D.⁷

36
- 79959789368
- M. F. Zhang Y. Wang K. F. Wang J. S. Zhu J. M. Liu J. Appl. Phys. 2009 105
- (2009) J. Appl. Phys. , pp. 105
- Zhang, M.F.¹ Wang, Y.² Wang, K.F.³ Zhu, J.S.⁴ Liu, J.M.⁵

37
- 0025448039
- R. Waser T. Baiatu K. H. Hardtl J. Am. Ceram. Soc. 1990 73 1645 1653
- (1990) J. Am. Ceram. Soc. , vol.73 , pp. 1645-1653
- Waser, R.¹ Baiatu, T.² Hardtl, K.H.³

38
- 0034246663
- S. Rodewald J. Fleig J. Maier J. Am. Ceram. Soc. 2000 83 1969 1976
- (2000) J. Am. Ceram. Soc. , vol.83 , pp. 1969-1976
- Rodewald, S.¹ Fleig, J.² Maier, J.³

39
- 84943002226
- N. J. Donnelly C. A. Randall J. Appl. Phys. 2011 109
- (2011) J. Appl. Phys. , pp. 109
- Donnelly, N.J.¹ Randall, C.A.²

40
- 60849104401
- N. J. Donnelly C. A. Randall J. Am. Ceram. Soc. 2009 92 405 410
- (2009) J. Am. Ceram. Soc. , vol.92 , pp. 405-410
- Donnelly, N.J.¹ Randall, C.A.²

41
- 34247175383
- N. Balke D. C. Lupascu T. Granzow J. Rodel J. Am. Ceram. Soc. 2007 90 1081 1087
- (2007) J. Am. Ceram. Soc. , vol.90 , pp. 1081-1087
- Balke, N.¹ Lupascu, D.C.² Granzow, T.³ Rodel, J.⁴

42
- 78650376368
- R.-A. Eichel Phys. Chem. Chem. Phys. 2011 13 368 384
- (2011) Phys. Chem. Chem. Phys. , vol.13 , pp. 368-384
- Eichel, R.-A.¹

43
- 84917736068
- R. A. De Souza V. Metlenko D. Park T. E. Weirich Phys. Rev. B: Condens. Matter Mater. Phys. 2012 85
- (2012) Phys. Rev. B: Condens. Matter Mater. Phys. , pp. 85
- De Souza, R.A.¹ Metlenko, V.² Park, D.³ Weirich, T.E.⁴

44
- 84916759162
- N. J. Donnelly C. A. Randall Appl. Phys. Lett. 2010 96
- (2010) Appl. Phys. Lett. , pp. 96
- Donnelly, N.J.¹ Randall, C.A.²

45
- 0033729512
- J. Claus M. Leohardt J. Maier J. Phys. Chem. Solids 2000 61 1199 1207
- (2000) J. Phys. Chem. Solids , vol.61 , pp. 1199-1207
- Claus, J.¹ Leohardt, M.² Maier, J.³

46
- 79953719984
- T. Frömling A. Schintlmeister H. Hutter J. Fleig J. Am. Ceram. Soc. 2011 94 1173 1181
- (2011) J. Am. Ceram. Soc. , vol.94 , pp. 1173-1181
- Frömling, T.¹ Schintlmeister, A.² Hutter, H.³ Fleig, J.⁴

47
- 84861101417
- T. Frömling H. Hutter J. Fleig J. Am. Ceram. Soc. 2012 95 1692 1700
- (2012) J. Am. Ceram. Soc. , vol.95 , pp. 1692-1700
- Frömling, T.¹ Hutter, H.² Fleig, J.³

48
- 76649095970
- K. Reichmann E. Volkl M. Ahrens J. Fleig J. Votsch J. Mater. Sci. 2010 45 1473 1477
- (2010) J. Mater. Sci. , vol.45 , pp. 1473-1477
- Reichmann, K.¹ Volkl, E.² Ahrens, M.³ Fleig, J.⁴ Votsch, J.⁵

49
- 84871490291
- L. Andrejs J. Fleig J. Eur. Ceram. Soc. 2013 33 779 794
- (2013) J. Eur. Ceram. Soc. , vol.33 , pp. 779-794
- Andrejs, L.¹ Fleig, J.²

50
- 84860416950
- E. Völkl P. Hillebrand J. Fleig J. Electroceram. 2011 27 66
- (2011) J. Electroceram. , vol.27 , pp. 66
- Völkl, E.¹ Hillebrand, P.² Fleig, J.³

51
- 79955900661
- J. A. Kilner S. J. Skinner H. H. Brongersma J. Solid State Electrochem. 2011 15 861 876
- (2011) J. Solid State Electrochem. , vol.15 , pp. 861-876
- Kilner, J.A.¹ Skinner, S.J.² Brongersma, H.H.³

52
- 12244303613
- T. Horita K. Yamaji N. Sakai Y. Xiong T. Kato H. Yokokawa T. Kawada Appl. Surf. Sci. 2003 203-204 634 638
- (2003) Appl. Surf. Sci. , vol.203-204 , pp. 634-638
- Horita, T.¹ Yamaji, K.² Sakai, N.³ Xiong, Y.⁴ Kato, T.⁵ Yokokawa, H.⁶ Kawada, T.⁷

53
- 42149127003
- R. A. De Souza M. Martin Phys. Chem. Chem. Phys. 2008 10 2356 2367
- (2008) Phys. Chem. Chem. Phys. , vol.10 , pp. 2356-2367
- De Souza, R.A.¹ Martin, M.²

54
- 23444460387
- R. A. De Souza R. J. Chater Solid State Ionics 2005 176 1915 1920
- (2005) Solid State Ionics , vol.176 , pp. 1915-1920
- De Souza, R.A.¹ Chater, R.J.²

55
- 0042810263
- T. Horita K. Yamaji N. Sakai Y. Xiong H. Yokokawa T. Kawada Ionics 2002 8 108 117
- (2002) Ionics , vol.8 , pp. 108-117
- Horita, T.¹ Yamaji, K.² Sakai, N.³ Xiong, Y.⁴ Yokokawa, H.⁵ Kawada, T.⁶

56
- 21244462514
- A. Benninghoven Angew. Chem., Int. Ed. Engl. 1994 33 1023 1043
- (1994) Angew. Chem., Int. Ed. Engl. , vol.33 , pp. 1023-1043
- Benninghoven, A.¹

57
- 0000037462
- A. Benninghoven Surf. Sci. 1973 35 427 457
- (1973) Surf. Sci. , vol.35 , pp. 427-457
- Benninghoven, A.¹

58
- 0035425877
- T. Stephan Planet. Space Sci. 2001 49 859 906
- (2001) Planet. Space Sci. , vol.49 , pp. 859-906
- Stephan, T.¹

59
- 0035908605
- A. J. Fahey S. Messenger Int. J. Mass Spectrom. 2001 208 227 242
- (2001) Int. J. Mass Spectrom. , vol.208 , pp. 227-242
- Fahey, A.J.¹ Messenger, S.²

60
- 0035447949
- P. Fielitz G. Borchardt Solid State Ionics 2001 144 71 80
- (2001) Solid State Ionics , vol.144 , pp. 71-80
- Fielitz, P.¹ Borchardt, G.²

61
- 19344373943
- R. A. De Souza J. Zehnpfenning M. Martin J. Maier Solid State Ionics 2005 176 1465 1471
- (2005) Solid State Ionics , vol.176 , pp. 1465-1471
- De Souza, R.A.¹ Zehnpfenning, J.² Martin, M.³ Maier, J.⁴

62
- 83555172373
- J. L. S. Lee I. S. Gilmore M. P. Seah Surf. Interface Anal. 2012 44 1 14
- (2012) Surf. Interface Anal. , vol.44 , pp. 1-14
- Lee, J.L.S.¹ Gilmore, I.S.² Seah, M.P.³

63
- 1842714914
- M. R. Keenan P. G. Kotula Surf. Interface Anal. 2004 36 203 212
- (2004) Surf. Interface Anal. , vol.36 , pp. 203-212
- Keenan, M.R.¹ Kotula, P.G.²

64
- 84881139464
- T. Stephan J. Zehnpfenning A. Benninghoven J. Vac. Sci. Technol., A 1994 12 405 410
- (1994) J. Vac. Sci. Technol., A , vol.12 , pp. 405-410
- Stephan, T.¹ Zehnpfenning, J.² Benninghoven, A.³

65
- 84883236323
- submitted
- M. Kubicek, G. Holzlechner, A. Opitz, S. Larisegger, H. Hutter and J. Fleig, Appl. Surf. Sci., 2013, submitted
- (2013) Appl. Surf. Sci.
- Kubicek, M.¹ Holzlechner, G.² Opitz, A.³ Larisegger, S.⁴ Hutter, H.⁵ Fleig, J.⁶

66
- 84957224374
- B. Hagenhoff D. van Leyen E. Niehuis A. Benninghoven J. Vac. Sci. Technol., A 1989 7 3056 3064
- (1989) J. Vac. Sci. Technol., A , vol.7 , pp. 3056-3064
- Hagenhoff, B.¹ Van Leyen, D.² Niehuis, E.³ Benninghoven, A.⁴

67
- 0005175760
- H. W. Werner N. Warmoltz J. Vac. Sci. Technol., A 1984 2 726 731
- (1984) J. Vac. Sci. Technol., A , vol.2 , pp. 726-731
- Werner, H.W.¹ Warmoltz, N.²

68
- 6344235017
- M. Senoner T. Wirth W. Unger W. Osterle I. Kaiander R. L. Sellin D. Bimberg Surf. Interface Anal. 2004 36 1423 U1429
- (2004) Surf. Interface Anal. , vol.36
- Senoner, M.¹ Wirth, T.² Unger, W.³ Osterle, W.⁴ Kaiander, I.⁵ Sellin, R.L.⁶ Bimberg, D.⁷

69
- 77955825527
- M. Senoner T. Wirth W. Unger J. Anal. At. Spectrom. 2010 25 1440 1452
- (2010) J. Anal. At. Spectrom. , vol.25 , pp. 1440-1452
- Senoner, M.¹ Wirth, T.² Unger, W.³

70
- 3042515329
- R. N. S. Sodhi Analyst 2004 129 483 487
- (2004) Analyst , vol.129 , pp. 483-487
- Sodhi, R.N.S.¹

71
- 84862523106
- M. Senoner W. Unger J. Anal. At. Spectrom. 2012 27 1050
- (2012) J. Anal. At. Spectrom. , vol.27 , pp. 1050
- Senoner, M.¹ Unger, W.²

72
- 84883217785
- PD ISO/TR 19319:2013: Surface chemical analysis, British Standards Institution
- PD ISO/TR 19319:2013: Surface chemical analysis, Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods, British Standards Institution, 2013
- (2013) Fundamental Approaches to Determination of Lateral Resolution and Sharpness in Beam-based Methods

73
- 0000312241
- B. Hagenhoff Mikrochim. Acta 2000 132 259 271
- (2000) Mikrochim. Acta , vol.132 , pp. 259-271
- Hagenhoff, B.¹

74
- 2942594079
- F. Kollmer Appl. Surf. Sci. 2004 231-232 153 158
- (2004) Appl. Surf. Sci. , vol.231-232 , pp. 153-158
- Kollmer, F.¹

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