Improving the performance of interferometers in metrological scanning probe microscopes

Measurement Science and Technology

Volumn 15, Issue 2, 2004, Pages 444-450

  Dai, Gaoliang ^a   Pohlenz, Frank ^a   Danzebrink, Hans Ulrich ^a   Hasche, Klaus ^a   Wilkening, Guenter ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Heydemann correction; Homodyne interferometer; Nonlinearity; Scanning probe microscope

Indexed keywords

BANDWIDTH; MICROSCOPES; NONLINEAR SYSTEMS; POSITION MEASUREMENT; SCANNING;

HEYDEMANN CORRECTIONS;

INTERFEROMETERS;

INTERFEROMETRY;

EID: 1342329504     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/15/2/019     Document Type: Article

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