Fabrication of a flexible penetrating microelectrode array for use on curved surfaces of neural tissues

Journal of Micromechanics and Microengineering

Volumn 23, Issue 12, 2013, Pages

  Byun, Donghak ^a   Cho, Sung Joon ^a   Kim, Sohee ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BULK MICROMACHINING TECHNOLOGY; FABRICATED STRUCTURES; MANUFACTURING PROCESS; MECHANICAL CHARACTERIZATIONS; MICROELECTRODE ARRAY; MICROELECTRODE DEVICES; POLYDIMETHYSILOXANE; SILICON SUBSTRATES;

ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; FABRICATION; HISTOLOGY; MICROCHANNELS; NEEDLES; SILICON; SURFACES; TISSUE;

MICROELECTRODES;

EID: 84889044171     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/12/125010     Document Type: Article

References (39)

1. Santhanam G, Ryu S I, Byron M Y, Afshar A and Shenoy K V 2006 A high-performance brain-computer interface Nature 442 195-8 (Pubitemid 44086565)
2. Hochberg L R and Donoghue J P 2006 Sensors for brain-computer interfaces IEEE Eng. Med. Biol. 25 32-8
3. Pohlmeyer E A, Perreault E J, Slutzky M W, Kilgore K L, Kirsch R F, Taylor D M and Miller L E 2007 Use of intracortical recordings to control a hand neuroprosthesis Proc. 3rd Int. IEEE EMBS Conf. on Neural Engineering (Kohala Coast, HI, 2007) pp 418-20 (Pubitemid 47432248)
4. Moritz C T, Perlmutter S I and Fetz E E 2008 Direct control of paralysed muscles by cortical neurons Nature 456 639-42
5. Kim S-P, Simeral J D, Hochberg L R, Donoghue J P and Black M J 2009 Computer cursor control by motor cortical signals in humans with tetraplegia Proc. ASCC (Hong Kong, China,) pp 988-93
6. Scherberger H 2009 Neural control of motor prostheses Curr. Opin. Neurobiol. 19 629-33
7. Hochberg L R et al 2013 Reach and grasp by people with tetraplegia using a neurally controlled robotic arm Nature 485 372-5
8. Normann R A 2007 Technology insight: future neuroprosthetic therapies for disorders of the nervous system Nature Clin. Pract. Neurol. 3 444-52 (Pubitemid 47202501)
9. Aggarwal V, Acharya S, Tenore F, Shin H-C, Etienne-Cummings R, Schieber M H and Thakor N V 2008 Asynchronous decoding of dexterous finger movements using M1 neurons IEEE Trans. Neural Syst. Rehabil. Eng. 16 3-14 (Pubitemid 351264085)
10. Ivanova M E, Gordeev S A, Ortmann V V and Baziyan B K 2008 Evaluation of cortical visual prostheses microelectrode array function Description of behavioral feline model EMBS'08: Proc. 30th Annu. Int. Conf. IEEE on Engineering in Medicine and Biology Society (Vancouver, Canada,) 3371-4
11. Berger T W, Hampson R E, Song D, Goonawardena A, Marmarelis V Z and Deadwyler S A 2011 A cortical neural prosthesis for restoring and enhancing memory J. Neural Eng. 8 046017
12. Dowden B R, Frankel M A, Normann R A and Clark G A 2011 Non-invasive method for selection of electrodes and stimulus parameters for FES applications with intrafascicular arrays J. Neural Eng. 9 016006
13. Ethier C, Oby E R, Bauman M J and Miller L E 2013 Restoration of grasp following paralysis through brain-controlled stimulation of muscles Nature 485 368-71
14. Kim C and Wise K D 1996 A 64-site multishank CMOS low-profile neural stimulating probe IEEE J. Solid-State Circuits 31 1230-8 (Pubitemid 126576627)
15. Yao Y, Gulari M N, Hetke J F and Wise K D 2004 A low-profile three-dimensional neural stimulating array with on-chip current generation Proc. IEEE 26 1994-7 (Pubitemid 40035804)
16. Jones K E, Campbell P K and Normann R A 1992 A glass/silicon composite intracortical electrode array Ann. Biomed. Eng. 20 423-37
17. Wang R, Zhao W, Wang W and Li Z 2012 A flexible microneedle electrode array with solid silicon needles J. Microelectromech. Syst. 21 1084-9
18. Branner A, Stein R B, Fernandez E, Aoyagi Y and Normann R A 2004 Long-term stimulation and recording with a penetrating microelectrode array in cat sciatic nerve IEEE Trans. Biomed. Eng. 51 146-57 (Pubitemid 38009972)
19. Vince V, Thil M, Gérard A, Veraart C, Delbeke J and Colin I M 2005 Cuff electrode implantation around the sciatic nerve is associated with an upregulation of TNF-a and TGF-h1 J. Neuroimmunol. 159 75-86 (Pubitemid 40126179)
20. Branner A, Stein R B, Fernandez E, Aoyagi Y and Normann R A 2004 Long-term stimulation and recording with a penetrating microelectrode array in cat sciatic nerve IEEE Trans. Biomed. Eng. 51 146-57 (Pubitemid 38009972)
21. Bhandari R, Negi S, Rieth L, Normann R A and Solzbacher F 2008 A novel method of fabricating convoluted shaped electrode arrays for neural and retinal prostheses Sensors Actuators A 145-146 123-30
22. Chow W W Y, Lei K F, Shi G, Li W J and Huang Q 2005 Microfluidic channel fabrication by PDMS-interface bonding Smart Mater. Struct. 15 S112
23. Duffy D C, McDonald J C, Schueller O J A and Whitesides G M 1998 Rapid prototyping of microfluidic systems in poly(dimethylsiloxane) Anal. Chem. 70 4974-84 (Pubitemid 28553167)
24. Choi J, Lee K-H and Yang S 2011 Fabrication of PDMS through-holes using the MIMIC method and the surface treatment by atmospheric-pressure CH4/He RF plasma J. Micromech. Microeng. 21 097001
25. Bhandari R, Negi S and Solzbacher F 2010 Wafer-scale fabrication of penetrating neural microelectrode arrays Biomed. Microdevices 12 797-807
26. Horch K W and Dhillon G S 2004 Neuroprosthetics (Singapore: World Scientific)
27. Negi S, Bhandari R, Rieth L and Solzbacher F 2009 Effect of sputtering pressure on pulsed-DC sputtered iridium oxide films Sensors Actuators B 137 370-8
28. Sharma A et al 2012 Evaluation of the packaging and encapsulation reliability in fully integrated, fully wireless 100 channel Utah slant electrode array (USEA): implications for long term functionality Sensors Actuators A 188 167-72
29. Bhandari R, Negi S, Rieth L, Töpper M, Normann R A and Solzbacher F 2007 Wafer level processing of silicon arrays for implantable medical ECTC'07: Proc. 57th Electronic Components and Technology Conf. (Reno, NV,) 1567-72 (Pubitemid 47577237)
30. Sergi P N, Jensen W, Micera S and Yoshida K 2012 In vivo interactions between tungsten microneedles and peripheral nerves Med. Eng. Phys. 34 747-55
31. Ju M, Lin K and Lin C 2004 Transverse elasticity of rabbit sciatic nerves tested by in vitro compression J. Chin. Inst. Eng. 27 965-71
32. McDonald J C and Whitesides G M 2002 Poly(dimethylsiloxane) as a material for fabricating microfluidic devices Acc. Chem. Res. 35 491-9
33. Mata A, Fleischman A J and Roy S 2005 Characterization of polydimethylsiloxane (PDMS) properties for biomedical micro/nanosystems Biomed. Microdevices 7 281-93
34. Hassler C, Metzen von R P, Ruther P and Stieglitz T 2010 Characterization of parylene C as an encapsulation material for implanted neural prostheses J. Biomed. Mater. Res. B 93 266-74
35. Hochberg L R, Serruya M D, Friehs G M, Mukand J A, Saleh M, Caplan A H, Branner A, Chen D, Penn R D and Donoghue J P 2006 Neuronal ensemble control of prosthetic devices by a human with tetraplegia Nature 442 164-71 (Pubitemid 44086558)
36. Branner A, Stein R B and Normann R A 2001 Selective stimulation of cat sciatic nerve using an array of varying-length microelectrodes J. Neurophysiol. 85 1585-94 (Pubitemid 32280599)
37. Bhandari R, Negi S, Rieth L, Normann R A and Solzbacher F 2009 A novel masking method for high aspect ratio penetrating microelectrode arrays J. Micromech. Microeng. 19 035004
38. Negi S, Bhandari R, Rieth L and Sozbacher F 2010 In vitro comparison of sputtered iridium oxide and platium-coated neural implantable microelectrode arrays Biomed. Mater. 5 015007
39. Flueckiger J, Bazargan V, Stoeber B and Cheung K C 2011 Characterization of postfabricated parylene C coatings inside PDMS microdevices Sensors Actuators B 160 864-74