A novel method of fabricating convoluted shaped electrode arrays for neural and retinal prostheses

Sensors and Actuators, A: Physical

Volumn 145-146, Issue 1-2, 2008, Pages 123-130

  Bhandari, R ^a   Negi, S ^a   Rieth, L ^a   Normann, R A ^a   Solzbacher, F ^a,b  

^a University of Utah   (United States)

^b UNIVERSITY OF UTAH   (United States)

Author keywords

Dicing; Electrode arrays; Micromachining; Neural and retinal prostheses; Wet isotropic etching

Indexed keywords

METALLIZING;

ELECTRODE ARRAYS; FABRICATION TECHNIQUES; HIGH-DENSITY; NOVEL METHODS; RETINAL PROSTHESES;

FABRICATION;

EID: 44849136201     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.10.072     Document Type: Article

References (7)

1. Campbell P.K., Jones K.E., Huber R.J., Horch K.W., and Normann R.A. A silicon-based, three dimensional neural interface: manufacturing processes for an intra cortical electrode array. IEEE Trans. Biomed. Eng. 38 August (38) (1991) 758-768
2. Jones K.E., Campbell P.K., and Normann R.A. A glass/silicon composite intra cortical electrode array. Ann. Biomed. Eng. 20 (1992) 423-437
3. Branner A., Stein R.B., Fernandez E., Aoyagi Y., and Normann R.A. Long term stimulation and recording with a penetrating microelectrode array in cat sciatic nerve. IEEE Trans. Biomed. Eng. 51 1 (2004) 146-157
4. Edell D.J., Toi V., McNeil V.M., and Clark D. Factors influencing the biocompatibility of insertable silicon microshafts in cerebral cortex. IEEE Trans. Biomed. Eng. 39 (1992) 635-643
5. Beard R.B., Hung B.N., and Schmukler R. Bio-compatibility considerations at stimulating electrode interface. Ann. Biomed. Eng. 20 (1992) 395-410
6. Bhandari R., Negi S., Rieth L., Toepper M., Normann R.A., and Solzbacher F. Wafer level processing of silicon arrays for implantable medical devices. Proceedings of the 57th Electronic Components and Technology Conference (ECTC). Reno, Nevada, May 29-June 1 (2007)
7. J.M. Hsu, L. Rieth, S. Kammer, K.P. Koch, R.A. Normann, F. Solzbacher, PECVD a-SiC:H and Parylene encapsulation for chronically implanted neural recording devices, NIH/NINDS Neural Interfaces Workshop, Bethesda, MD, September 7-9, 2005.