A flexible microneedle electrode array with solid silicon needles

Journal of Microelectromechanical Systems

Volumn 21, Issue 5, 2012, Pages 1084-1089

  Wang, Renxin ^a   Zhao, Wei ^b   Wang, Wei ^a   Li, Zhihong ^a  

^a PEKING UNIVERSITY   (China)

^b INSTITUTE OF MICROELECTRONICS   (China)

Author keywords

3 D microelectrode array (MEA); Electrical stimulation; parylene; penetration; solid needle

Indexed keywords

ELECTRICAL STIMULATIONS; ELECTRODE ARRAYS; FABRICATION PROCESS; IMPEDANCE SPECTROSCOPY; MICROELECTRODE ARRAY; MICRONEEDLES; PARYLENE FILM; PARYLENES; PENETRATION; SILICON STRUCTURES; SILICON-ON-INSULATOR SUBSTRATES; SOLID SILICON; SUPPORT MATERIALS;

MICROELECTRODES; TISSUE;

NEEDLES;

EID: 84867103461     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2203790     Document Type: Article

References (18)

1. A. C. Johnson and K. D. Wise, "A robust batch-fabricated high-density cochlear electrode array," in Proc. MEMS, Hong Kong, Jan. 24-28, 2010, pp. 1007-1010.
2. J. M. Seo, S. J. Kim, H. Chung, E. T. Kim, H. G. Yu, and Y. S. Yu, "Biocompatibility of polyimide microelectrode array for retinal stimulation," Mater. Sci. Eng. C, vol. 24, no. 1/2, pp. 185-189, Jan. 2004. (Pubitemid 38005747)
3. R. Bhandari, S. Negi, L. Rieth, R. A. Normann, and F. Solzbacher, "A novel masking method for high aspect ratio penetrating microelectrode arrays," J. Micromech. Microeng., vol. 19, no. 3, pp. 035004-1-035004-8, Mar. 2009.
4. H. Y. Chu, T. Y. Kuo, B. Chang, S. Lu, C. Chiao, and W. Fang, "Design and fabrication of novel three-dimensional multi-electrode array using SOI wafer," Sens. Actuators A, Phys., vol. 130/131, pp. 254-261, Aug. 2006. (Pubitemid 44037360)
5. R. Bhandari, S. Negi, L. Rieth, R. A. Normann, and F. Solzbacher, "A novel method of fabricating convoluted shaped electrode arrays for neural and retinal prostheses," Sens. Actuators A, Phys., vol. 145/146, no. 1/2, pp. 123-130, 2008.
6. S. Hong, S. Lee, H. Yoo, J. Ahn, S. Park, K. Koo, and D. Cho, "Mechanical and electrical evaluation for the long-term stability of implanted 3D retinal microelectrode," in Proc. TRANSDUCERS, Beijing, China, Jun. 5-9, 2011, pp. 202-205.
7. T. Wang, W. Yang, H. Huang, and C. Fu, "A novel fabrication method of flexible micro electrode array for neural recording," in Proc. MEMS, Kobe, Japan, Jan. 21-25, 2007, pp. 295-300.
8. T. Fofonoff, C. Wiseman, R. Dyer, J. MalaSek, J. Burgert, S. Martel, I. Hunter, N. Hatsopoulos, and J. Donoghue, "Mechanical assembly of a microelectrode array for use in a wireless intracortical recording device," in Proc. 2nd Ann. Inf. IEEE-EMBS Special Topic Conf. Microtech. Med. Biol., Madison, WI, May 2002, pp. 269-272.
9. S. Pigeon, M. Meunier, M. Sawan, and S. Martel, "Design and fabrication of a microelectrode array dedicated for cortical electrical stimulation," in Proc. IEEE-CCECE, Montreal, QC, Canada, May 4-7, 2003, vol. 2, pp. 813-816.
10. S. Choi, Y. C. Kim, J. H. Park, J. Hutcheson, H. S. Gill, Y. K. Yoon, M. R. Prausnitz, and M. G. Allen, "An electrically active microneedle array for electroporation," Biomed Microdevices, vol. 12, no. 2, pp. 263-273, Apr. 2010.
11. R. Wang, X. Huang, G. Liu, W. Wang, F. Dong, and Z. Li, "Fabrication and characterization of a parylene-based 3D microelectrode array for use in retinal prosthesis," J. Microelectromech. Syst., vol. 19, no. 2, pp. 367-374, Apr. 2010.
12. R. Wang, W. Zhao, W. Wang, and Z. Li, "Fabrication and properties of 3D flexible parylene-based microelectrode array with silicon tips," in Proc. MEMS, Cancun, Mexico, Jan. 23-27, 2011.
13. E. Meng, P. Y. Li, and Y. C. Tai, "Plasma removal of parylene," J. Micromech. Microeng., vol. 18, no. 4, pp. 045 004-1-045 004-13, Apr. 2008.
14. E. Margalit, M. Maia, J. D. Weiland, R. J. Greenberg, G. Y. Fujii, G. Torres, D. V. Piyathaisere, T. M. O'Hearn, W. Liu, G. Lazzi, G. Dagnelie, D. A. Scribner, E. Juan, and M. S. Humayun, "Retinal prosthesis for the blind," Surv. Ophthalmol., vol. 47, no. 4, pp. 335-356, Jul./Aug. 2002. (Pubitemid 34879925)
15. G. Kotzar, M. Freas, P. Abel, A. Fleischman, S. Roy, C. Zorman, J. M. Moran, and J. Melzak, "Evaluation of MEMS materials of construction for implantable medical devices," Biomaterials, vol. 23, no. 13, pp. 2737-2750, Jul. 2002. (Pubitemid 34465734)
16. M. A. Hopcroft, W. D. Nix, and T. W. Kenny, "What is the Young's modulus of silicon?" J. Microelectromech. Syst., vol. 19, no. 2, pp. 229-238, Apr. 2010.
17. J. E. B. Randles, "Kinetics of rapid electrode reactions," in Proc. Discuss. Faraday Soc., 1947, pp. 11-19.
18. N. Abser, "Solid silicon microneedles for safe and effective drug delivery to human eye," J. Elect. Eng., Inst. Eng., Bangladesh, vol. EE 36, no. II, pp. 28-34, Dec. 2009.