Fabrication of PDMS through-holes using the MIMIC method and the surface treatment by atmospheric-pressure CH4/He RF plasma

Journal of Micromechanics and Microengineering

Volumn 21, Issue 9, 2011, Pages

  Choi, Jongchan ^a   Lee, Kyeong Hwan ^b   Yang, Sung ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Chonnam National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION METHOD; FABRICATION PROCESS; MICRO FLUIDIC SYSTEM; MICRO MIXERS; MICROFLUIDIC CHANNEL; MICROMOLDING IN CAPILLARIES; MULTI-LAYERED; RF PLASMA; THROUGH HOLE;

FABRICATION; FLUIDIC DEVICES; MICROCHANNELS; MICROFLUIDICS; PLASMA THEORY; WAVE PLASMA INTERACTIONS;

SURFACE TREATMENT;

EID: 80052211299     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/9/097001     Document Type: Article

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