Pulsed laser deposition of piezoelectric ZnO thin films for bulk acoustic wave devices

Applied Surface Science

Volumn 288, Issue , 2014, Pages 572-578

  Serhane, Rafik ^a   Abdelli Messaci, Samira ^a   Lafane, Slimane ^a   Khales, Hammouche ^a   Aouimeur, Walid ^a   Hassein Bey, Abdelkadder ^a,b   Boutkedjirt, Tarek ^c  

^a CENTRE DE DÉVELOPPEMENT DES TECHNOLOGIES AVANCÉES   (Algeria)

^b UNIVERSITY OF BLIDA   (Algeria)

^c UNIVERSITY OF SCIENCES AND TECHNOLOGY HOUARI BOUMEDIENE   (Algeria)

Author keywords

Bulk acoustic waves (BAW); Piezoelectricity; Pulsed laser deposition (PLD); Thin films; ZnO

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC WAVES; CRYSTALLINE MATERIALS; CRYSTALLOGRAPHY; ELECTROMECHANICAL COUPLING; II-VI SEMICONDUCTORS; MEMS; METALLIC FILMS; MOBILE TELECOMMUNICATION SYSTEMS; OPTICAL FILMS; PIEZOELECTRICITY; PLATINUM; PULSED LASER DEPOSITION; PULSED LASERS; SCANNING ELECTRON MICROSCOPY; SCATTERING PARAMETERS; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION; ZINC OXIDE; ZINC SULFIDE;

BULK ACOUSTIC WAVES; ELECTRICAL MEASUREMENT; ELECTROMECHANICAL COUPLING COEFFICIENTS; HONEYCOMBLIKE STRUCTURES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); PIEZOELECTRIC PROPERTY; PIEZOELECTRIC RESPONSE; SUBSTRATE TEMPERATURE;

SILICON COMPOUNDS;

EID: 84888434907     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.10.075     Document Type: Article

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