Fabrication of 945 MHz band film surface acoustic wave resonators using ZnO thin film with Si substrate

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2007, Pages 176-180

  Ntagwirumugara, E ^a   Gryba, T ^a   Zhang, V ^a   Carlier, J ^a   Lefebvre, J E ^a  

^a OPTO+   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVE VELOCITY; ACOUSTIC WAVES; ACOUSTICS; ALUMINA; CARBON DIOXIDE ARC WELDING; ELECTRIC CURRENTS; FREQUENCY BANDS; METALLIC FILMS; METALLIZING; PIEZOELECTRICITY; RESONATORS; SAWING; SEMICONDUCTING ZINC COMPOUNDS; SILICON; SUBSTRATES; THICK FILMS; TRANSFER FUNCTIONS; ULTRASONIC TRANSDUCERS; WAVE FILTERS; ZINC ALLOYS; ZINC OXIDE;

EUROPEAN; METALLIZATION; SI SUBSTRATE;

FREQUENCY RESPONSE;

EID: 51049112025     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2007.4319058     Document Type: Conference Paper

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