Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 45, Issue 1, 1998, Pages 257-263

  Naik, Rajan S ^a   Lutsky, Joseph J ^a   Reif, Rafaël ^a   Sodini, Charles G ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; MATHEMATICAL MODELS; RESONANCE; THIN FILM DEVICES; X RAY DIFFRACTION ANALYSIS;

BUTTERWORTH VAN DYKE (BVD) MODELS; ELECTROMECHANICAL COUPLING CONSTANT;

PIEZOELECTRIC MATERIALS;

EID: 0031672244     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.646930     Document Type: Article

References (13)

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