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Volumn 5, Issue 12, 2013, Pages 1930-1939

Structural and electro-optical properties of hydrogen and aluminum-co-doped zinc oxide films deposited by sputtering at various deposition temperatures

(2) Liang, Chih Hao a Hwang, Weng Sing a

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

Author keywords

Electro optical properties; Hydrogen and aluminum Co doped zinc oxide; Sputter deposition; Structural properties

Indexed keywords

EID: 84888411516 PISSN: 19472935 EISSN: 19472943 Source Type: Journal
DOI: 10.1166/sam.2013.1659 Document Type: Article

Times cited : (6)

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