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Volumn 9, Issue 46, 2013, Pages 11007-11013
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Guided wrinkling in swollen, pre-patterned photoresist thin films with a crosslinking gradient
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Author keywords
[No Author keywords available]
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Indexed keywords
CROSS-LINKING GRADIENTS;
DEPTH-WISE GRADIENT;
HIERARCHICAL PATTERNS;
LIGHT-ABSORBING DYE;
PHOTOCROSS-LINKING;
PHYSICAL CONFINEMENT;
THERMOPLASTICITY;
WRINKLING PATTERNS;
BUCKLING;
MORPHOLOGY;
PHOTORESISTS;
THIN FILMS;
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EID: 84887507949
PISSN: 1744683X
EISSN: 17446848
Source Type: Journal
DOI: 10.1039/c3sm51881g Document Type: Article |
Times cited : (48)
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References (53)
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