Effect of mold treatment by solvent on PDMS molding into nanoholes

Nanoscale Research Letters

Volumn 8, Issue 1, 2013, Pages 1-6

  Con, Celal ^a,b   Cui, Bo ^a,b  

^a UNIVERSITY OF WATERLOO   (Canada)

^b UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Capillary filling; Molding; Nanoimprint lithography; PDMS; Surface energy

Indexed keywords

ADHESION; FILLING; HEXANE; INTERFACIAL ENERGY; MICROCHANNELS; MOLDING; MOLDS; NANOIMPRINT LITHOGRAPHY; NANOTECHNOLOGY; POLYDIMETHYLSILOXANE; PULSE WIDTH MODULATION; TOLUENE; VISCOSITY; WETTING;

CAPILLARY FILLING; DOW CORNING CORPORATIONS; EASY FABRICATION; HIGH VISCOSITIES; NANO-SCALE PATTERNS; POLYDIMETHYLSILOXANE PDMS; SOFT LITHOGRAPHY; WETTING PROPERTY;

SILICONES;

EID: 84887309446     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-8-394     Document Type: Article

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