Fabrication nano-pillars pattern on PDMS using anodic aluminum oxide film as template

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8323, Issue , 2012, Pages

  Ting, Yung Chiang ^a   Shy, Shyi Long ^b  

^a FAR EAST UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

anodic aluminum oxide; nano pillars arrays; poly(dimethylsiloxane)

Indexed keywords

ATOMIC FORCE MICROSCOPY; MICROCHANNELS; MOLDS; NANOSTRUCTURES; OPTICAL FILMS; OPTOELECTRONIC DEVICES; POLYDIMETHYLSILOXANE; SCANNING ELECTRON MICROSCOPY; SILICONES;

ANODIC ALUMINUM OXIDE; ANODIC ALUMINUM OXIDE FILMS; BIO-DEVICES; DATA STORAGE; NANO-PILLARS ARRAYS; NANOPILLARS ARRAY; ORDERED NANOSTRUCTURES;

ANODIC OXIDATION;

EID: 84887290812     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.916456     Document Type: Conference Paper

References (15)

1. Lee, J. N., Park, C. and Whitesides, G. M. Anal. Chem., 75, 6544-6554 (2003).
2. McDonald, J. C.; Whitesides, G. M. Acc. Chem. Res., 35, 491-499 (2002).
3. Ng, J. M. K., Gitlin, I., Stroock, A. D., and Whitesides, G. M. Electrophoresis, 23, 3461-3473 (2002).
4. Zhou, W., Zhang, J., Li, X., Liu, Y., Min, G., Song, Z., Zhang, J., Applied Surface Science 255, 8019-8022 (2009).
5. Chou, S.Y., Krauss, P.R., Renstrom, P.J., Science 272, 85 (1996).
6. L.J. Guo, Adv. Mater. 19, 495 (2007).
7. Hamouda, F., Sahaf, H., Held, S., Barbillon, G., Gogol, P., Moyen, E., Aassime, A., Moreau, J., Canva, M., et al. Microelectronic Engineering 88, 2444-2446 (2011).
8. Kang, H., Lee, J., Park, J., and Lee, H. H., Nanotechnology 17, 197-200 (2006).
9. Wang, M., Lu, Y., Surface & Coatings Technology 204, 525-530 (2009).
10. Byeon, K.J., Hwang, S.Y., Lee, H., Microelectronic Engineering 85, 830-833 (2008).
11. Strijkers, G. J.; Dalderop, J. H. J.; Broeksteeg, M. A. A.; Swagten, H. J. M.; de Jonge, W. J. M. J. Appl. Phys. 86, 5141 (1999).
12. Tang, M., He, J., Zhou, J., He, P., Mater. Lett. 60, 2098 (2006).
13. Evans, U., Colavita, P. E., Doescher, M. S., Schiza, M., Myrick, M. L., Nano Lett. 2, 641 (2002).
14. Hamada, N., Sawada, S. O., A. Phys. ReV. Lett. 68, 1579 (1992).
15. Cho, S.H., Oh, H.J., Park, C.S., Chang, J.M., Chi, C.S., Korea J. Mater. Res. 12, 100 (2002).