-
4
-
-
0013403913
-
-
H. Aoki, S. Yamasaki, and N. Aoto, Electrochem, Soc. Proc., 99, 102 (1999).
-
(1999)
Electrochem, Soc. Proc.
, vol.99
, pp. 102
-
-
Aoki, H.1
Yamasaki, S.2
Aoto, N.3
-
5
-
-
0036868683
-
-
A. A. Busnaina, H. Lin, N. Moumen, J. W. Feng, and J. Taylor, IEEE Trans. Semicond. Manufact., 15, 374 (2002).
-
(2002)
IEEE Trans. Semicond. Manufact.
, vol.15
, pp. 374
-
-
Busnaina, A.A.1
Lin, H.2
Moumen, N.3
Feng, J.W.4
Taylor, J.5
-
6
-
-
31344458776
-
-
K. Xu, R. Vos, G. Vereecke, G. Doumen, W. Fyen, P. W. Mertens, M. M. Heyns, C. Vinckier, and J. Fransaer, J. Vac. Sci. Technol. B, 23, 2160 (2005).
-
(2005)
J. Vac. Sci. Technol. B
, vol.23
, pp. 2160
-
-
Xu, K.1
Vos, R.2
Vereecke, G.3
Doumen, G.4
Fyen, W.5
Mertens, P.W.6
Heyns, M.M.7
Vinckier, C.8
Fransaer, J.9
-
8
-
-
84930001670
-
-
R. Sherman, J. Grob, and W. Whitlock, J. Vac. Sci. Technol. B, 9, 1970 (1991).
-
(1991)
J. Vac. Sci. Technol. B
, vol.9
, pp. 1970
-
-
Sherman, R.1
Grob, J.2
Whitlock, W.3
-
10
-
-
84967468274
-
-
World Scientific, Singapore
-
D. M. Kane, Laser Cleaning II, World Scientific, Singapore (2006).
-
(2006)
Laser Cleaning II
-
-
Kane, D.M.1
-
11
-
-
36449005632
-
-
K. Imen, S. J. Lee, and S. D. Allen, Appl. Phys. Lett., 58, 203 (1991).
-
(1991)
Appl. Phys. Lett.
, vol.58
, pp. 203
-
-
Imen, K.1
Lee, S.J.2
Allen, S.D.3
-
12
-
-
0001248896
-
-
W. Zapka, W. Ziemlich, and A. C. Tam, Appl. Phys. Lett., 58, 2217 (1991).
-
(1991)
Appl. Phys. Lett.
, vol.58
, pp. 2217
-
-
Zapka, W.1
Ziemlich, W.2
Tam, A.C.3
-
13
-
-
36448999056
-
-
A. C. Tam,W. P. Leunt,W. Zapka, andW. Ziemlich, J. Appl. Phys., 71, 3515 (1992).
-
(1992)
J. Appl. Phys.
, vol.71
, pp. 3515
-
-
Tam, A.C.1
Leunt, W.P.2
Zapka, W.3
Ziemlich, W.4
-
14
-
-
0027558390
-
-
W. Zapka, W. Ziemlich, W. P. Leung, and A. C. Tam, Microelectron. Eng., 20, 171 (1993).
-
(1993)
Microelectron. Eng.
, vol.20
, pp. 171
-
-
Zapka, W.1
Ziemlich, W.2
Leung, W.P.3
Tam, A.C.4
-
16
-
-
0029358119
-
-
A. A. Busnaina, I. I. Kashkoush, and G. W. Gale, J. Electrochem. Soc., 142, 2812 (1995).
-
(1995)
J. Electrochem. Soc.
, vol.142
, pp. 2812
-
-
Busnaina, A.A.1
Kashkoush, I.I.2
Gale, G.W.3
-
18
-
-
0347182912
-
-
Y. F. Lu, Y. Zhang, Y. H. Wan, and W. D. Song, Appl. Surf. Sci., 138-139, 140 (1999).
-
(1999)
Appl. Surf. Sci.
, vol.138-139
, pp. 140
-
-
Lu, Y.F.1
Zhang, Y.2
Wan, Y.H.3
Song, W.D.4
-
19
-
-
4344679284
-
-
B. S. Luk'Yanchuk, Z. B. Wang, W. D. Song, and M. H. Hong, Appl. Phys. A: Mat. Sci. Process., 79, 747 (2004).
-
(2004)
Appl. Phys. A: Mat. Sci. Process.
, vol.79
, pp. 747
-
-
Luk'Yanchuk, B.S.1
Wang, Z.B.2
Song, W.D.3
Hong, M.H.4
-
20
-
-
0344771168
-
-
G. Vereecke, E. Rohr, and M. M. Heyns, J. Appl. Phys., 85, 3837 (1999).
-
(1999)
J. Appl. Phys.
, vol.85
, pp. 3837
-
-
Vereecke, G.1
Rohr, E.2
Heyns, M.M.3
-
21
-
-
0013415343
-
-
Y. F. Lu, W. D. Song, M. H. Hong, B. S. Teo, T. C. Chong, and T. S. Low, J. Appl. Phys., 80, 499 (1996).
-
(1996)
J. Appl. Phys.
, vol.80
, pp. 499
-
-
Lu, Y.F.1
Song, W.D.2
Hong, M.H.3
Teo, B.S.4
Chong, T.C.5
Low, T.S.6
-
23
-
-
0037960105
-
-
J. M. Lee, S. H. Cho, J. G. Park, S. H. Lee, Y. P. Han, and S. Y. Kim, Proceedings of the 3rd International Symposium on Laser Precision Microfabrication, p. 287 (2002).
-
(2002)
Proceedings of the 3rd International Symposium on Laser Precision Microfabrication
, pp. 287
-
-
Lee, J.M.1
Cho, S.H.2
Park, J.G.3
Lee, S.H.4
Han, Y.P.5
Kim, S.Y.6
-
24
-
-
0036065426
-
-
C. Cetinkaya, R. Vanderwood, and M. Rowell, J. Adhes. Sci. Technol., 16, 1201 (2002).
-
(2002)
J. Adhes. Sci. Technol.
, vol.16
, pp. 1201
-
-
Cetinkaya, C.1
Vanderwood, R.2
Rowell, M.3
-
25
-
-
20444437157
-
-
H. Lim, D. Jang, D. Kim, J. W. Lee, and J.-M. Lee, J. Appl. Phys., 97, 054903 (2005).
-
(2005)
J. Appl. Phys.
, vol.97
, pp. 054903
-
-
Lim, H.1
Jang, D.2
Kim, D.3
Lee, J.W.4
Lee, J.-M.5
-
26
-
-
31944432719
-
-
Y. J. Kang, S.H. Lee, J.G. Park, J.M. Lee, and T.H. Kim, Electrochem. Soc. Fall Meet., p. 786 (2003).
-
(2003)
Electrochem. Soc. Fall Meet.
, pp. 786
-
-
Kang, Y.J.1
Lee, S.H.2
Park, J.G.3
Lee, J.M.4
Kim, T.H.5
-
27
-
-
84887371751
-
-
July
-
J. M. Lee, S. Y. You, J. G. Park, and A. A. Busnaina, Semicond. Int., p. 93 July (2003).
-
(2003)
Semicond. Int.
, pp. 93
-
-
Lee, J.M.1
You, S.Y.2
Park, J.G.3
Busnaina, A.A.4
-
28
-
-
31944446095
-
-
S. H. Lee, Y. J. Kang, J. G. Park, A. A. Busnaina, J. M. Lee, T. H. Kim, G. Zhang, F. Eschbach, and A. Ramamoorthy, Jpn. J. Appl. Phys., 44, 5560 (2005).
-
(2005)
Jpn. J. Appl. Phys.
, vol.44
, pp. 5560
-
-
Lee, S.H.1
Kang, Y.J.2
Park, J.G.3
Busnaina, A.A.4
Lee, J.M.5
Kim, T.H.6
Zhang, G.7
Eschbach, F.8
Ramamoorthy, A.9
-
29
-
-
84882363997
-
-
D. M. Kane, Editor, World Scientific Publishing, Singapore
-
D. Jang andD. Kim, in Laser Cleaning II, D. M. Kane, Editor, p. 133,World Scientific Publishing, Singapore (2006).
-
(2006)
Laser Cleaning II
, pp. 133
-
-
Jang, D.1
Kim, D.2
-
31
-
-
33645660982
-
-
V. K. Devarapalli, M. D. Murthy Peri, and C. Cetinkaya, J. Adhes. Sci. Technol., 20, 233 (2006).
-
(2006)
J. Adhes. Sci. Technol.
, vol.20
, pp. 233
-
-
Devarapalli, V.K.1
Murthy Peri, M.D.2
Cetinkaya, C.3
-
36
-
-
85041148503
-
-
John Wiley & Sons, New York
-
B. R. Munson, D. F. Young, and T. H. Okiishi, Fundamentals of Fluid Mechanics, 5th ed., p. 320, John Wiley & Sons, New York (2005).
-
(2005)
Fundamentals of Fluid Mechanics, 5th Ed.
, pp. 320
-
-
Munson, B.R.1
Young, D.F.2
Okiishi, T.H.3
-
43
-
-
34250133611
-
-
D. Etling, H. W. Detering, and F. Theunert, Arch. Met. Geoph. Biocl., A33, 355 (1985).
-
(1985)
Arch. Met. Geoph. Biocl.
, vol.A33
, pp. 355
-
-
Etling, D.1
Detering, H.W.2
Theunert, F.3
-
48
-
-
0000469962
-
-
K. L. Johnson, K. Kendall, and A. D. Roberts, Proc. Roy. Soc. London A, 324, 301 (1971).
-
(1971)
Proc. Roy. Soc. London A
, vol.324
, pp. 301
-
-
Johnson, K.L.1
Kendall, K.2
Roberts, A.D.3
-
49
-
-
33244484721
-
-
B. V. Derjaguin, V. M. Muller, and Y. P. Toporov, J. Colloid Interface Sci., 53, 314 (1975).
-
(1975)
J. Colloid Interface Sci.
, vol.53
, pp. 314
-
-
Derjaguin, B.V.1
Muller, V.M.2
Toporov, Y.P.3
-
50
-
-
0033877376
-
-
F. Zhang, A. A. Busnaina, M. A. Fury, and S. Wang, J. Electron. Mater., 29, 199 (2000).
-
(2000)
J. Electron. Mater.
, vol.29
, pp. 199
-
-
Zhang, F.1
Busnaina, A.A.2
Fury, M.A.3
Wang, S.4
-
51
-
-
0028714897
-
-
S. Krishnan, A. A. Busnaina, D. S. Rimai, and L. P. Demejo, J. Adhesion Sci. Technol., 8, 1357 (1994).
-
(1994)
J. Adhesion Sci. Technol.
, vol.8
, pp. 1357
-
-
Krishnan, S.1
Busnaina, A.A.2
Rimai, D.S.3
Demejo, L.P.4
|