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Volumn 16, Issue 9, 2002, Pages 1201-1214
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Nanoparticle removal from substrates with pulsed-laser induced plasma and shock waves
a
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Author keywords
Laser cleaning; Laser induced plasma; Laser ultrasonics; Micro manufacturing; Nano manufacturing; Nanoparticles; Particle removal
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Indexed keywords
DRY CLEANING;
LASER BEAMS;
LASER PRODUCED PLASMAS;
NEODYMIUM LASERS;
PULSED LASER APPLICATIONS;
REMOVAL;
SHOCK WAVES;
SILICA;
SILICON WAFERS;
THERMAL EXPANSION;
WAVEFRONTS;
MANUFACTURE;
NANOPARTICLES;
LASER CLEANING;
LASER ULTRASONICS;
NANOPARTICLE REMOVAL;
PULSED LASER INDUCED PLASMA;
NANOSTRUCTURED MATERIALS;
SUBSTRATES;
LASER CLEANING;
LASER INDUCED PLASMA;
LASER ULTRASONICS;
MICRO-MANUFACTURING;
NANO-MANUFACTURING;
PARTICLE REMOVAL;
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EID: 0036065426
PISSN: 01694243
EISSN: None
Source Type: Journal
DOI: 10.1163/156856102320256846 Document Type: Article |
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Times cited : (53)
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References (29)
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