Extending and tuning the travel range of microelectromechanical actuators using electrically reconfigurable nano-structured electrodes

Journal of Microelectromechanical Systems

Volumn 22, Issue 5, 2013, Pages 1001-1003

  Jain, Ankit ^a   Alam, Muhammad Ashraful ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

Bifurcation; Fractal; Microelectrodes

Indexed keywords

ACTUATION MECHANISM; ELECTRODE GEOMETRIES; GEOMETRY PARAMETER; MICROELECTROMECHANICAL ACTUATORS; MOVABLE ELECTRODES; NANO-STRUCTURED ELECTRODES; NON-LINEAR SPRINGS; PARALLEL-PLATE ACTUATORS;

BIFURCATION (MATHEMATICS); ELECTROSTATIC ACTUATORS; FRACTALS; MICROACTUATORS; MICROELECTRODES; TUNING;

NANOSTRUCTURES;

EID: 84885172725     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2266614     Document Type: Article

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