Surface morphology and interface chemistry under ion irradiation - Simultaneous atomistic simulation of collisional and thermal kinetics

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 316, Issue , 2013, Pages 56-61

  Liedke, Bartosz ^a   Heinig, Karl Heinz ^a   Möller, Wolfhard ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

BCA; Ion beam irradiation; KMC; Large scale simulation; Ripple formation; TRIDER

Indexed keywords

BCA; ION BEAM IRRADIATION; KMC; LARGE SCALE SIMULATIONS; RIPPLE FORMATION; TRIDER;

INTELLIGENT SYSTEMS; INTERMETALLICS; ION BEAMS; ION BOMBARDMENT; IONS; METALS; MIXING; SOFTWARE PACKAGES; SURFACE DEFECTS;

KINETICS;

EID: 84884537596     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2013.08.036     Document Type: Article

References (35)

1. P. Süle, and K.H. Heinig The molecular dynamics simulation of ion-induced ripple growth J. Chem. Phys. 131 20 2009 204704
2. R.A. Enrique, K. Nordlund, R.S. Averback, and P. Bellon Simulations of dynamical stabilization of Ag-Cu nanocomposites by ion-beam processing J. Appl. Phys. 93 2003 2917
3. S. Garruchet, and M. Perez Modelling the carbon snoek peak in ferrite: coupling molecular dynamics and kinetic Monte-Carlo simulations Comput. Mater. Sci. 43 2008 286
4. N.N. Negulyaev, V.S. Stepanyuk, W. Hergert, P. Bruno, and J. Kirschner Atomic-scale self-organization of Fe nanostripes on stepped Cu(1 1 1) surfaces: molecular dynamics and kinetic Monte Carlo simulations Phys. Rev. B 77 2008 085430
5. I. Koponen, M. Hautala, and O.P. Sievanen Simulations of submicrometer-scale roughening on ion-bombarded solid surfaces Phys. Rev. B 54 1996 13502
6. B.K. Kellerman, J.A. Floro, E. Chason, D.K. Brice, S.T. Picraux, and J.M. White Defect production and recombination during low-energy ion processing J. Vac. Sci. Technol. A 13 1995 972
7. M.V.R. Murty, B. Cowles, and B.H. Cooper Surface smoothing during sputtering: mobile vacancies versus adatom detachment and diffusion Surf. Sci. 415 1998 328
8. E.O. Yewande, A.K. Hartmann, and R. Kree Propagation of ripples in Monte Carlo models of sputter-induced surface morphology Phys. Rev. B 71 2005 195405
9. E. Chason, W.L. Chan, and M.S. Bharathi Kinetic monte carlo simulations of ion-induced ripple formation: dependence on flux, temperature, and defect concentration in the linear regime Phys. Rev. B 74 2006 224103
10. M. Strobel, K.H. Heinig, and W. Möller Three-dimensional domain growth on the size scale of the capillary length: effective growth exponent and comparative atomistic and mean-field simulations Phys. Rev. B 64 2001 245422
11. I. Koponen, O.P. Sievanen, M. Hautala, and M. Hakovirta Simulations of sputtering induced roughening and formation of surface topography in deposition of amorphous diamond films with mass separated kiloelectronvolt ion beams J. Appl. Phys. 82 1997 6047
12. N. Anspach, and S.J. Linz Modeling particle redeposition in ion-beam erosion processes under normal incidence J. Stat. Mech. Theory E 2010 06023
13. C.S. Madi, B. Davidovitch, H.B. George, S.A. Norris, M.P. Brenner, and M.J. Aziz Multiple bifurcation types and the linear dynamics of ion sputtered surfaces Phys. Rev. Lett. 101 2008 246102
14. A. Keller, S. Rossbach, S. Facsko, and W. Möller Simultaneous formation of two ripple modes on ion sputtered silicon Nanotechnology 19 2008 135303
15. S. Wolfram Statistical mechanics of cellular automata Rev. Mod. Phys. 55 1983 601
16. J.P. Biersack, and W. Eckstein Sputtering studies with the Monte Carlo program TRIM.SP Appl. Phys. A 34 1984 73
17. J.P. Biersack, and L.G. Haggmark A Monte-Carlo computer-program for the transport of energetic ions in amorphous targets Nucl. Instr. Meth. 174 1980 257
18. W. Möller, W. Eckstein, and J.P. Biersack TRIDYN - binary collision simulation of atomic collisions and dynamic composition changes in solids Comput. Phys. Commun. 51 1988 355
19. W. Möller, M. Posselt, TRIDYN - FZR User Manual, vol. 317, FZR Publication, Dresden-Rossendorf, 2002.
20. K.M. Klein, C.H. Park, and A.F. Tasch Modeling of cumulative damage effects on ion-implantation profiles Nucl. Instr. Meth. B 59 1991 60
21. M. Strobel, Modeling and computer simulation of ion beam synthesis of nanostructures (Ph.D. thesis), TU Dresden, 1999.
22. R. Röntzsch, Shape evolution of nanostructures by thermal and ion beam processing (Ph.D. thesis), TU Dresden, 2007.
23. G. Hobler, and G. Betz On the useful range of application of molecular dynamics simulations in the recoil interaction approximation Nucl. Instr. Meth. B 180 2001 203
24. H.Y. Chan, M.P. Srinivasan, N.J. Montgomery, C.P.A. Mulcahy, S. Biswas, H.J.L. Gossmann, M. Harris, K. Nordlund, F. Benistant, C.M. Ng, D. Gui, and L. Chan Application of molecular dynamics for low-energy ion implantation in crystalline silicon J. Vac. Sci. Technol. B 24 1 2006 462
25. A.K. Hartmann, R. Kree, U. Geyer, and M. Kolbel Long-time effects in a simulation model of sputter erosion Phys. Rev. B 65 2002 193403
26. M. Stepanova, and S.K. Dew Surface relaxation in ion-etch nanopatterning Appl. Phys. Lett. 84 2004 1374
27. S.A. Norris, J. Samela, L. Bukonte, M. Backman, F. Djurabekova, K. Nordlund, C.S. Madi, M.P. Brenner, and M.J. Aziz Molecular dynamics of single-particle impacts predicts phase diagrams for large scale pattern formation Nat. Commun. 2 2011 276
28. Z. Yang, M. Lively, and J.P. Allain Atomistic simulation of ion beam patterning with crater functions Nucl. Instr. Meth. B. 307 2013 189 195
29. G. Ehrlich, and F.G. Hudda Atomic view of surface self-diffusion - tungsten on tungsten J. Chem. Phys. 44 3 1966 1039
30. R.L. Schwoebel Step motion on crystal surfaces. 2 J. Appl. Phys. 40 2 1969 614
31. F.V. Nolfi Phase transformations during irradiation 1983 Applied Science Publishers; Sole distributor in the USA and Canada, Elsevier Science London; New York, USA
32. H. Bernas, J.-P. Attane, K.-H. Heinig, D. Halley, D. Ravelosona, A. Marty, P. Auric, C. Chappert, and Y. Samson Ordering intermetallic alloys by ion irradiation: a way to tailor magnetic media Phys. Rev. Lett. 91 2003 077203
33. F. Soisson Kinetic Monte Carlo simulations of radiation induced segregation and precipitation J. Nucl. Mater. 349 2006 235
34. K.-H. Heinig, T. Muller, B. Schmidt, M. Strobel, and W. Möller Interfaces under ion irradiation: growth and taming of nanostructures Appl. Phys. A 77 2003 17
35. 2 Nucl. Instr. Meth. B 191 2002 462