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Volumn 24, Issue 1, 2006, Pages 462-467

Application of molecular dynamics for low-energy ion implantation in crystalline silicon

Author keywords

[No Author keywords available]

Indexed keywords

BINARY COLLISION APPROXIMATION (BCA); DENSITY FUNCTIONAL THEORY (DFT);

EID: 31544459899     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2137333     Document Type: Article
Times cited : (4)

References (15)
  • 7
    • 31544468827 scopus 로고    scopus 로고
    • DMOL is a trademark of Accelrys Inc. San Diego, California, USA.
    • DMOL is a trademark of Accelrys Inc. San Diego, California, USA.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.