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Volumn 24, Issue 1, 2006, Pages 462-467
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Application of molecular dynamics for low-energy ion implantation in crystalline silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
BINARY COLLISION APPROXIMATION (BCA);
DENSITY FUNCTIONAL THEORY (DFT);
CRYSTALLIZATION;
ION IMPLANTATION;
MONTE CARLO METHODS;
PROBABILITY DENSITY FUNCTION;
SILICON;
MOLECULAR DYNAMICS;
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EID: 31544459899
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.2137333 Document Type: Article |
Times cited : (4)
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References (15)
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