Cyclic scheduling of sequentially connected cluster tools with a single I/O module

IFAC Proceedings Volumes (IFAC-PapersOnline)

Volumn 46, Issue 9, 2013, Pages 146-151

  Kim, Dae Kyu ^a   Lee, Tae Eog ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Dual armed cluster tool; Linear; Multi cluster; Scheduling; Sequentially connected

Indexed keywords

ROBOTS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

CLUSTER TOOL; CYCLIC SCHEDULING; CYCLIC SCHEDULING PROBLEMS; LINEAR; MULTI-CLUSTER; MULTI-CLUSTER TOOLS; SCHEDULING STRATEGIES; SEQUENTIALLY CONNECTED;

TOOLS;

EID: 84884309511     PISSN: 14746670     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.3182/20130619-3-RU-3018.00108     Document Type: Conference Paper

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