Design and characterization of a soft multi-axis force sensor using embedded microfluidic channels

IEEE Sensors Journal

Volumn 13, Issue 10, 2013, Pages 4056-4064

  Vogt, Daniel M ^a   Park, Yong Lae ^a   Wood, Robert J ^b  

^a HARVARD UNIVERSITY   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

eutectic gallium indium (eGaIn); force sensors; liquid metal; Soft sensors; tactile sensors

Indexed keywords

CHANNEL CONFIGURATION; ELECTRICAL RESISTANCES; EMBEDDED MICROCHANNELS; EUTECTIC GALLIUM INDIUMS (EGAIN); FORCE SENSOR; IN-PLANE SHEAR FORCES; SOFT SENSORS; TACTILE SENSORS;

DESIGN; LIQUID METALS; MICROCHANNELS;

SENSORS;

EID: 84884141665     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2013.2272320     Document Type: Article

References (27)

1. D. Marculescu, R. Marculescu, N. Zamora, P. Stanley-Marbell, P. Khosla, S. Park, S. Jayaraman, S. Jung, C. Lauterbach, W. Weber, T. Kirstein, D. Cottet, J. Grzyb, G. Troster, M. Jones, T. Martin, and Z. Nakad, "Electronic textiles: A platform for pervasive computing," Proc. IEEE, vol. 91, no. 12, pp. 1995-2018, Dec. 2003.
2. Y.-L. Park, B. Chen, D. Young, L. Stirling, R. J. Wood, E. Goldfield, and R. Nagpal, "Bio-inspired active soft orthotic device for ankle foot pathologies," in Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst., San Francisco, CA, USA, Sep. 2011, pp. 4488-4495.
3. Y.-L. Park, B. Chen, C. Majidi, and R. J. Wood, "Active modular elastomer sleeve for soft wearable assistance robots," in Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst., Vilamoura, Portugal, Oct. 2012, pp. 1595-1602.
4. R. F. Shepherd, F. Ilievski, W. Choi, S. A. Morin, A. A. Stokes, A. A. Mazzero, X. Chen, M. Wang, and G. M. Whitesides, "Multigate soft robot," Proc. Nat. Acad. Sci. USA, vol. 108, no. 51, pp. 20400-20403, 2011.
5. R. Tajima, S. Kagami, M. Inaba, and H. Inoue, "Development of soft and distributed tactile sensors and the application to a humanoid robot," Adv. Robot., vol. 16, no. 4, pp. 381-397, 2002.
6. P. Puangmali, K. Althoefer, L. Seneviratne, D. Murphy, and P. Dasgupta, "State-of-the-art in force and tactile sensing for minimally invasive surgery IEEE Sensors J., vol. 8, no. 4, pp. 371-381, Apr. 2008.
7. Y.-L. Park, S. Elayaperumal, B. Daniel, S. C. Ryu, M. Shin, J. Savall, R. J. Black, B. Moslehi, and M. R. Cutkosky, "Real-time estimation of 3-D needle shape and deflection for MRI-guided interventions IEEE/ASME Trans. Mech., vol. 15, no. 6, pp. 906-915, Dec. 2010.
8. Y.-L. Park, S. C. Ryu, R. J. Black, K. Chau, B. Moslehi, and M. R. Cutkosky, "Exoskeletal force-sensing end-effectors with embedded optical fiber-bragg-grating sensors IEEE Trans. Robot., vol. 25, no. 6, pp. 1319-1331, Dec. 2009.
9. A. M. Dollar and R. D. Howe, "The highly adaptive SDM hand: Design and performance evaluation Int. J. Robot. Res., vol. 29, no. 5, pp. 585-597, 2010.
10. A. Okamura and M. Cutkosky, "Feature detection for haptic exploration with robotic fingers Int. J. Robot. Res., vol. 20, no. 12, pp. 925-938, 2001.
11. V. J. Lumelsky, M. S. Shur, and S. Wagner, "Sensitive skin IEEE Sensors J., vol. 1, no. 1, pp. 41-51, Jun. 2001.
12. Y.-L. Park, B. Chen, and R. J. Wood, "Design and fabrication of soft artificial skin using embedded microchannels and liquid conductors IEEE Sensors J., vol. 12, no. 8, pp. 2711-2718, Aug. 2012.
13. Y.-L. Park, C. Majidi, R. Kramer, P. Berard, and R. J. Wood, "Hyperelastic pressure sensing with a liquid-embedded elastomer J. Micromech. Microeng., vol. 20, no. 12, p. 125029, 2010.
14. Y.-L. Park, D. Tepayotl-Ramirez, R. J. Wood, and C. Majidi, "Influence of cross-sectional geometry on the sensitivity and hysteresis of liquidphase electronic pressure sensors Appl. Phys. Lett., vol. 101, no. 19, pp. 191904-1-191904-4, 2012.
15. C. Majidi, R. Kramer, and R. Wood, "A non-differential elastomer curvature sensor for softer-than-skin electronics Smart Mater. Struct., vol. 20, no. 10, p. 105017, 2011.
16. R. Kramer, C. Majidi, R. Sahai, and R. J. Wood, "Soft curvature sensors for joint angle proprioception in Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst., San Francisco, CA, USA, Sep. 2011, pp. 1919-1926.
17. A. Barlian, S. Park, V. Mukundan, and B. Pruitt, "Design and characterization of microfabricated piezoresistive floating element-based shear stress sensors Sens. Actuators A, Phys., vol. 134, no. 1, pp. 77-87, 2007.
18. F. Jiang, G.-B. Lee, Y.-C. Tai, and C.-M. Ho, "A flexible micromachinebased shear-stress sensor array and its application to separation-point detection Sens. Actuators A, Phys., vol. 79, no. 3, pp. 194-203, 2000.
19. Y. Xu, Y. Tai, A. Huang, and C. Ho, "IC-integrated flexible shear-stress sensor skin J. Microelectromech. Syst., vol. 12, no. 5, pp. 740-747, 2003.
20. M. Hsieh, Y. Fang, M. Ju, G. Chen, J. Ho, C. Yang, P. Wu, G. Wu, and T. Chen, "A contact-type piezoresistive micro-shear stress sensor for above-knee prosthesis application J. Microelectromech. Syst., vol. 10, no. 1, pp. 121-127, 2001.
21. E.-S. Hwang, J.-H. Seo, and Y.-J. Kim, "A polymer-based flexible tactile sensor for both normal and shear load detections and its application for robotics J. Microelectromech. Syst., vol. 16, no. 3, pp. 556-563, 2007.
22. H. Kwon, J. Kim, and W. Choi, "Development of a flexible three-axial tactile sensor array for a robotic finger Microsyst. Technol., vol. 17, no. 12, pp. 1721-1726, 2011.
23. C.-H. Chuang, Y.-R. Liou, and C.-W. Chen, "Detection system of cincident slippage and friction coefficient based on a flexible tactile sensor with structural electrodes Sens. Actuators A, Phys., vol. 188, pp. 48-55, Dec. 2012.
24. H.-K. Lee, J. Chung, S.-I. Chang, and E. Yoon, "Normal and shear force measurement using a flexible polymer tactile sensor with embedded multiple capacitors normal and shear force measurement using a flexible polymer tactile sensor with embedded multiple capacitors J. Microelectromech. Syst., vol. 17, no. 4, pp. 934-942, 2008.
25. J. Missinne, E. Bosman, B. V. Hoe, G. V. Steenberg, S. Kalathimekkad, P. V. Daele, and J. Vanfleteren, "Flexible shear sensor based on embedded optoelectronic components IEEE Photon. Technol. Lett., vol. 23, no. 12, pp. 771-773, Jun. 2011.
26. D. Vogt, Y.-L. Park, and R. J. Wood, "A soft multi-axis force sensor in Proc. IEEE Sensors Conf., Taipei, Taiwan, Oct. 2012, pp. 1-4.
27. D. Tepayotl-Ramirez, T. Lu, Y.-L. Park, and C. Majidi, "Collapse of triangular channels in a soft elastomer Appl. Phys. Lett., vol. 102, no. 4, pp. 044102-1-044102-4, 2013.