Development of a flexible three-axial tactile sensor array for a robotic finger

Microsystem Technologies

Volumn 17, Issue 12, 2011, Pages 1721-1726

  Kwon, Hyun Joon ^a   Kim, Jong Ho ^b   Choi, Woo Chang ^c  

^a UNIVERSITY OF MARYLAND   (United States)

^b Korea Research Institute of Standards and Science   (South Korea)

^c Busan Techno Park   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED POLYMERS; COMPLIANT SURFACES; HYSTERESIS ERRORS; KAPTON POLYIMIDE; MICROMACHINING TECHNOLOGIES; PIEZO-RESISTIVE; ROBOTIC FINGER; SENSOR UNITS; SHEAR LOADS; SLIP DETECTION; STRAIN GAUGE; TACTILE SENSOR ARRAY; TACTILE SENSORS; THIN METALS;

INTELLIGENT AGENTS; POLYIMIDES; POLYMERIC FILMS; ROBOTIC ARMS; ROBOTICS; STRAIN GAGES;

SENSOR ARRAYS;

EID: 84855657058     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-011-1368-x     Document Type: Article

References (16)

1. Beccai L, Roccella S, Arena A, Valvo F, Valdastri P, Menciassi A, Carrozza MC, Dario P (2005) Design and fabrication of a hybrid silicon three-axial force sensor for biomechanical applications. Sens Actuator A Phys 120:370-382. doi:10.1016/j.sna.2005.01.007 (Pubitemid 40567830)
2. Chu Z, Sarro PM, Middelhoek S (1996) Silicon three-axial tactile sensor. Sens Actuator A Phys 54:505-510. doi:10.1016/A0924- 4247(95)01190-0 (Pubitemid 126357002)
3. Duchaine V, Lauzier N, Baril M, Lacasse MC, Gosselin C (2009) A flexible robot skin for safe physical human robot interaction. Interntional Conference on Robotics and Automation IEEE 3676-3681. doi:10.1109/ROBOT.2009.5152595
4. Engel J, Chen J, Fan Z, Liu C (2005) Polymer micromachined multimodal tactile sensor. Sens Actuators A Phys 117:50-61. doi:10.1016/j.sna.2004.05.037
5. Hwang ES, Seo JH, Kim YJ (2007) A polymer-based flexible tactile sensor for both normal and shear load detections and its application for robotics. J Microelectromech Syst 16:556-563. doi:10.1109/JMEMS.2007.896716 (Pubitemid 47241356)
6. Kim JH, Choi WC, Kwon HJ, Kang DI (2006) Development of tactile sensor with function of contact force and thermal sensing for attachment to intelligent robot finger tip. 5th Conference on Sensors IEEE 1468-1472. doi:10.1109/ICSEN.2007.355911
7. Krishna GM, Rajanna K (2004) Tactile sensor based on piezoelectric resonance. IEEE Sens J 4:691-697. doi:10.1109/JSEN.2004. 833505
8. Kwon HJ, Choi WC (2010) Design and fabrication of a flexible threeaxial tactile sensor array based on polyimide micromachining. Microsyst Technol 16:2029-2035. doi:10.1007/s00542-010- 1125-6
9. Lee JC, Lee DW (2010) Flexible and tactile sensor based on a photosensitive polymer. Microelectron Eng 87:1400-1403. doi: 10.1016/j.mee.2009.11.161
10. Lee HK, Chang SI, Yoon E (2006) A flexible polymer tactile sensor: fabrication and modular expandability for large area deployment. J Microelectromech S 15:1681-1686. doi:10.1109/JMEMS. 2006.886021 (Pubitemid 44921787)
11. Leineweber M, Pelz G, Schmidt M, Kappert H, Zimmer G (2000) New tactile sensor chip with silicon rubber cover. Sens Actuator A Phys 84:236-245. doi:10.1016/S0924-4247(00)00310-1
12. Liu T, Inoue Y, Shibata K (2009) A small and low-cost 3-D tactile sensor for a wearable force plate. IEEE Sens J 9:1103-1110. doi: 10.1109/JSEN.2009. 2026509
13. Mei T, Li WJ, Ge Y, Chen Y, Ni L, Chan MH (2000) An integrated MEMS three-dimensional tactile sensor with large force range. Sens Actuator A Phys 80:155-162. doi:10.1016/S0924- 4247(99)00261-7 (Pubitemid 30559022)
14. Motoo K, Fumihito A, Fukuda T (2007) Piezoelectric vibration-type tactile sensor using elasticity and viscosity change of structure. IEEE Sens J 7:1044-1051. doi:10.1109/JSEN.2007.895973
15. Ohka M, Kobayashi H, Mitsuya Y (2005) Sensing characteristics of an optical three-axis tactile sensor mounted on a multi-fingered robotic hand. International Conference Intelligent Robots and Systems IEEE 493-498. doi:10.1109/IROS.2005.1545264 (Pubitemid 43896591)
16. Yussof H, Abdullah SC, Ohka M (2010) Development of optical three-axis tactile sensor and its application to robotic hand for dexterous manipulation tasks. International Conference on Mathematical/Analytical Modeling and Computer Simulation 624-629. doi:10.1109/AMS.2010.126