Flexible micromachine-based shear-stress sensor array and its application to separation-point detection

Sensors and Actuators, A: Physical

Volumn 79, Issue 3, 2000, Pages 194-203

  Jiang, Fukang ^a   Lee, Gwo Bin ^b   Tai, Yu Chong ^b   Ho, Chih Ming ^c  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PLASTIC FILMS; POLYIMIDES; REACTIVE ION ETCHING; SHEAR STRESS; SILICON;

FLEXIBLE SHEAR-STRESS SENSOR ARRAY; SEPARATION-POINT DETECTION;

MICROSENSORS;

EID: 0033888145     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00277-0     Document Type: Article

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