An Optimal Residency-Aware Scheduling Technique for Cluster Tools With Buffer Module

IEEE Transactions on Semiconductor Manufacturing

Volumn 17, Issue 1, 2004, Pages 68-73

  Rostami, Shadi ^a   Hamidzadeh, Babak ^a  

^a UNIVERSITY OF BRITISH COLUMBIA   (Canada)

Author keywords

Buffer; Cluster tools; Deadline; Residency constraints; Scheduling

Indexed keywords

ALGORITHMS; CHEMICAL VAPOR DEPOSITION; CONSTRAINT THEORY; LINEAR PROGRAMMING; PROCESS CONTROL; SCHEDULING;

BUFFER RESOURCES; CLUSTER TOOLS; RESIDENCY CONSTRAINTS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 1342329492     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2003.822725     Document Type: Article

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