Liquid tunable microlenses based on MEMS techniques

Journal of Physics D: Applied Physics

Volumn 46, Issue 32, 2013, Pages

  Zeng, Xuefeng ^a,b   Jiang, Hongrui ^a,c,d  

^a University of Wisconsin Madison   (United States)

^b GLOBALFOUNDRIES US Inc   (United States)

^c UNIVERSITY OF WISCONSIN MADISON   (United States)

^d UNIVERSITY OF WISCONSIN SCHOOL OF MEDICINE AND PUBLIC HEALTH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOCAL LENGTHS; LIQUID MICROLENSE; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICRO FLUIDIC SYSTEM; MICRO-LENS; RECENT PROGRESS; TUNABLE MICRO-LENSES; TUNABLE MICROLENS;

ELECTROMECHANICAL DEVICES; MEMS;

MICROLENSES;

EID: 84881189472     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/46/32/323001     Document Type: Review

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