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Advanced Materials

Volumn 14, Issue 20, 2002, Pages 1502-1506

Fabrication of diffractive and micro-optical elements using microlens projection lithography

(2) Wu, M H a Whitesides, G M a

a HARVARD UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTROPLATING; ETCHING; MICROLENSES; MOLDING; OPTICAL SYSTEMS; PHOTORESISTS; SUBSTRATES;

MICROLENS ARRAY; MICROLENS PROJECTION LITHOGRAPHY; MICROOPTICAL ELEMENTS;

OPTICAL DEVICES;

EID: 0037121079 PISSN: 09359648 EISSN: None Source Type: Journal
DOI: 10.1002/1521-4095(20021016)14:20<1502::AID-ADMA1502>3.0.CO;2-M Document Type: Article

Times cited : (54)

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