Fabrication of multilayer systems combining microfluidic and microoptical elements for fluorescence detection

Journal of Microelectromechanical Systems

Volumn 10, Issue 4, 2001, Pages 482-491

  Roulet, Jean Christophe ^b   Völkel, Reinhard ^c   Herzig, Hans Peter ^b   Verpoorte, Elisabeth ^b   De Rooij, Nico F ^a,b   Dändliker, René ^b  

^a IEEE

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^c Karl Suss KG   (Switzerland)

Author keywords

TAS; Fluorescence detection; Glass to glass bonding; Refractive microlens; Wet etching

Indexed keywords

ETCHING; FABRICATION; FLUORESCENCE; MICROLENSES; MULTILAYERS; SIGNAL TO NOISE RATIO;

MICROFLUIDICS; MICROOPTICAL ELEMENTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035624853     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.967369     Document Type: Article

References (34)

1. A silicon flow cell for optical detection in miniaturized total analysis systems
2. Microfabrication of a planar absorbance and fluorescence cell for integrated capillary electrophoresis devices
3. A multireflection cell for enhanced absorbance detection in microchip-based capillary electrophoresis devices
4. Holographic refractive index detector for application in microchip-based separation systems
5. Chip-scale universal detection based on backscatter interferometry
6. High-speed DNA genotyping using microfabricated capillary array electrophoresis chips
7. Electrochemical detection in polymer microchannels
8. Dual-electrode electrochemical detection for poly(dimethylsiloxane)-fabricated capillary electrophoresis microchips
9. Optimization of confocal epifluorescence microscopy for microchip-based miniaturized total analysis systems
10. Red diode laser induced fluorescence detection with a confocal microscope on a microchip for capillary electrophoresis
11. Miniaturized total chemical analysis systems: A novel concept for chemical sensing
12. Counting single chromophore molecules for ultrasensitive analysis and separations on microchip devices
13. Single-molecule detection of DNA separations in microfabricated capillary electrophoresis chips employing focused molecular streams
14. Capillary array electrophoresis
15. Line-addressable torsional micromirrors for light modulator arrays
16. Micromachining for optical and optoelectronic systems
17. Micro-optical systems for fluorescence detection in μTAS applications
18. Microlens systems for fluorescence detection in chemical microsystems
19. Micro-optic integration for fluorescence detection in μTAS systems
20. Design, fabrication and testing of microlens arrays for sensors and microsystems
21. Valveless, sealed microfluidics device for automated heterogeneous immunoassay: Design and operational considerations
22. Rapid injection and separation of amino acids with capillary electrophoresis systems micromachined on a glass chip
23. Method for fabrication of microfluidic systems in glass
24. Imaging at low light level in fluorescence microscopy
25. Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers
26. Anodic bonding of silicon to silicon wafers coated with aluminum, silicon oxide, polysilicon or silicon nitride
27. 2 glass in aqueous HF solutions
28. Twymann-Green interferometer for testing microspheres
29. Handbook of lens design
30. Holographically recorded gratings on microlenses for a miniaturized spectrometer array
31. Miniaturized piezoelectrically driven fiber optics switches with transmittive microoptics