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Volumn 24, Issue 33, 2013, Pages

Strain-induced generation of silicon nanopillars

Author keywords

[No Author keywords available]

Indexed keywords

HIGH-RESOLUTION TECHNIQUES; HIGH-THROUGHPUT TECHNIQUE; METAL-ASSISTED CHEMICAL ETCHING; METAL-SILICON INTERFACES; NANOPILLAR FORMATION; SPONTANEOUS FORMATION; TECHNOLOGICAL APPLICATIONS; TRADITIONAL APPROACHES;

EID: 84881151659     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/24/33/335302     Document Type: Article
Times cited : (8)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.