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Volumn 52, Issue 6 PART 1, 2013, Pages

Spectroscopic analysis of graphitization and grain orientation of carbon films grown by photoemission-assisted plasma-enhanced chemical vapor deposition

(9) Inukai, Manabu a Ikenaga, Eiji a,d Muro, Takayuki a Ogawa, Shuichi b,d Ojiro, Yoshihiro b Takakuwa, Yuji b,d Sato, Motonobu b,c,d Nihei, Mizuhisa c,d Yokoyama, Naoki c

a JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE (Japan)

b TOHOKU UNIVERSITY (Japan)

c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

d JAPAN SCIENCE AND TECHNOLOGY AGENCY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING STATE; GRAIN ORIENTATION; HAX-PES; HIGHLY ORIENTED PYROLYTIC GRAPHITE; LOW TEMPERATURE GROWTH;

CARBON FILMS; GRAPHITIZATION; PHOTOELECTRON SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SPECTROSCOPIC ANALYSIS; VAPORS; X RAY ABSORPTION SPECTROSCOPY;

GRAPHITE;

EID: 84881037968 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.7567/JJAP.52.065503 Document Type: Article

Times cited : (4)

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