SCOPUS 정보 검색 플랫폼

Volumn 523, Issue , 2012, Pages 25-28

Synthesis of diamond-like carbon films on Si substrates by photoemission-assisted plasma-enhanced chemical vapor deposition

(5) Yang, Meng a Ogawa, Shuichi a Takabayashi, Susumu a,b Otsuji, Taiichi a,b Takakuwa, Yuji a

a TOHOKU UNIVERSITY (Japan)

b JAPAN SCIENCE AND TECHNOLOGY AGENCY (Japan)

Author keywords

Diamond like carbon; Gate insulator; Graphene channel field effect transistor; Photoemission assisted plasma; Plasma enhanced CVD; Raman spectroscopy

Indexed keywords

CONSTANT RATE; DIAMOND-LIKE CARBON; DLC FILM; GATE DIELECTRIC LAYERS; GATE INSULATOR; PHOTO-ELECTRON EMISSION; PLASMA-ENHANCED CVD; SI SUBSTRATES; UV PHOTONS;

CARBON FILMS; DIAMONDS; FIELD EFFECT TRANSISTORS; FILM GROWTH; GATE DIELECTRICS; GRAPHENE; PHOTOEMISSION; PHOTONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SILICON; VAPORS;

DIAMOND LIKE CARBON FILMS;

EID: 84869090804 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2012.05.059 Document Type: Conference Paper

Times cited : (9)

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