Micromachined semi-encapsulaed spiral inductors for micro electro mechanical systems (mems) applications

IEEE Transactions on Magnetics

Volumn 33, Issue 5 PART 1, 1997, Pages 3319-3321

  Sadler, Daniel J ^a   Zhang, Wenjin ^a   Ahn, Chong H ^a  

^a University of Cincinnati   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; ELECTROPLATING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SUBSTRATES;

SEMI ENCAPSULATED SPIRAL INDUCTORS;

ELECTRIC INDUCTORS;

EID: 0031223865     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.617930     Document Type: Article

References (9)

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