Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas

Review of Scientific Instruments

Volumn 84, Issue 5, 2013, Pages

  Kim, Young Cheol ^a   Jang, Sung Ho ^a   Oh, Se Jin ^a   Lee, Hyo Chang ^a   Chung, Chin Wook ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTION MEASUREMENT; EXTERNAL CONDITIONS; GAS MIXING RATIO; HIGH-SPEED MULTIPLEXERS; INDUCTIVE DISCHARGES; LOW TEMPERATURE PLASMAS; PLASMA UNIFORMITY; REAL TIME MEASUREMENTS;

ELECTRIC DISCHARGES; ELECTRON TEMPERATURE; PLASMA APPLICATIONS; PLASMA DENSITY; PLASMA DEVICES; PLASMA DIAGNOSTICS; TWO DIMENSIONAL;

SPATIAL DISTRIBUTION;

EID: 84878918810     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4802673     Document Type: Article

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