Floating probe for electron temperature and ion density measurement applicable to processing plasmas

Journal of Applied Physics

Volumn 101, Issue 3, 2007, Pages

  Lee, Min Hyong ^a   Jang, Sung Ho ^a   Chung, Chin Wook ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; IDENTIFICATION (CONTROL SYSTEMS); IONS; OPTICAL COATINGS; PLASMAS;

ELECTRON TEMPERATURE; LANGMUIR PROBE; PLASMA PROCESSING;

ELECTRON DENSITY MEASUREMENT;

EID: 33847109747     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2204352     Document Type: Article

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