An on-wafer probe array for measuring two-dimensional ion flux distributions in plasma reactors

Review of Scientific Instruments

Volumn 73, Issue 10, 2002, Pages 3494-

  Kim, Tae Won ^a   Ullal, Saurabh J ^a   Vahedi, Vahid ^b   Aydil, Eray S ^a  

^a University of California   (United States)

^b LAM RESEARCH CORPORATION   (United States)

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EID: 18744393710     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1502445     Document Type: Article

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