DSA hole defectivity analysis using advanced optical inspection tool

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8681, Issue , 2013, Pages

  Harukawa, Ryota ^a   Aoki, Masami ^a   Cross, Andrew ^a   Nagaswami, Venkat ^a   Tomita, Tadatoshi ^b   Nagahara, Seiji ^b   Muramatsu, Makoto ^b   Kawakami, Shinichiro ^b   Kosugi, Hitoshi ^b   Rathsack, Benjamen ^c   Kitano, Takahiro ^b   Sweis, Jason ^d   Mokhberi, Ali ^d  

^a KLA TENCOR CORPORATION   (United States)

^b TOKYO ELECTRON LTD   (Japan)

^c TOKYO ELECTRON AMERICA INC   (United States)

^d CADENCE DESIGN SYSTEMS   (United States)

Author keywords

Defectivity; Directed self assembly; Grapho epitaxy; Optical inspection

Indexed keywords

DEFECTIVITY; DENSITY DETECTIONS; DIRECTED SELF-ASSEMBLY; GRAPHO-EPITAXY; NEGATIVE TONE DEVELOPMENT (NTD); OPTICAL INSPECTION; POLYSTYRENE-B-POLY(METHYL METHACRYLATE); PROCESS CONDITION;

BLOCK COPOLYMERS; DEFECTS; EPITAXIAL GROWTH; ESTERS; OPTICAL INSTRUMENTS; OPTICAL TESTING; OPTIMIZATION; POLYMETHYL METHACRYLATES; POLYSTYRENES; PROCESS CONTROL; SELF ASSEMBLY; UNITS OF MEASUREMENT;

INSPECTION;

EID: 84878402472     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.2011177     Document Type: Conference Paper

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