Evaluation of robustness to surface conditions of the target factor analysis method for determining the dielectric function from reflection electron energy loss spectra: Application to GaAs

Surface and Interface Analysis

Volumn 45, Issue 6, 2013, Pages 985-992

  Jin, H ^a   Shinotsuka, H ^a   Yoshikawa, H ^a   Iwai, H ^a   Arai, M ^a   Tanuma, S ^a   Tougaard, S ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b UNIVERSITY OF SOUTHERN DENMARK   (Denmark)

Author keywords

dielectric function; energy loss function; factor analysis; GaAs; REELS

Indexed keywords

BULK ENERGY-LOSS FUNCTIONS; DIELECTRIC FUNCTIONS; ELECTRON ENERGY LOSS SPECTRUM; ELECTRON TRAJECTORIES; ENERGY LOSS FUNCTION; GAAS; KRAMERS-KRONIG ANALYSIS; TARGET FACTOR ANALYSIS;

ENERGY DISSIPATION; FACTOR ANALYSIS; GALLIUM ARSENIDE; MULTIVARIANT ANALYSIS; REELS; SEMICONDUCTING GALLIUM; SURFACE CLEANING; SURFACES;

ELECTRON ENERGY ANALYZERS;

EID: 84877053586     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.5196     Document Type: Article

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