Energy loss function for Si determined from reflection electron energy loss spectra with factor analysis method

Surface and Interface Analysis

Volumn 42, Issue 6-7, 2010, Pages 1076-1081

  Jin, Hua ^a   Yoshikawa, Hideki ^a   Tanuma, Shigeo ^a   Tougaard, Sven ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b UNIVERSITY OF SOUTHERN DENMARK   (Denmark)

Author keywords

Bulk plasmon loss; Differential inverse inelastic mean free path; Factor analysis; Si

Indexed keywords

DATA MATRICES; ELECTRON ENERGY LOSS SPECTRUM; ENERGY LOSS; ENERGY LOSS FUNCTION; FACTOR ANALYSIS; FACTOR ANALYSIS METHOD; GENERAL METHOD; INELASTIC MEAN FREE PATH; ITERATIVE CALCULATION; OPTICAL DATA; PLASMON LOSS; PRIMARY BEAM ENERGIES;

ELECTRIC FURNACES; ELECTRON ENERGY ANALYZERS; ENERGY DISSIPATION; PLASMONS; REELS; SILICON;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 77954267917     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3263     Document Type: Conference Paper

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