Angular and energy dependences of reflection electron energy loss spectra of Si

e-Journal of Surface Science and Nanotechnology

Volumn 7, Issue , 2009, Pages 199-202

  Jin, H ^a   Yoshikawa, H ^a   Iwai, H ^a   Tanuma, S ^a   Tougaard, S ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b UNIVERSITY OF SOUTHERN DENMARK   (Denmark)

Author keywords

Bulk plasmon loss; Differential inverse inelastic mean free path; Reflection electron energy loss spectroscopy; Si; Surface plasmon loss

Indexed keywords

DISSOCIATION; ELECTRON EMISSION; ELECTRON ENERGY ANALYZERS; ELECTRON SCATTERING; ELECTRONS; ENERGY DISSIPATION; REELS; SILICON; SURFACE PLASMONS;

BULK PLASMONS; ELECTRON BEAM ENERGY; ELECTRON ENERGY LOSS SPECTRUM; ENERGY DEPENDENCE; INCIDENT BEAM ENERGY; INELASTIC MEAN FREE PATH; REFLECTION ELECTRON ENERGY LOSS SPECTROSCOPIES; RELATIVE CONTRIBUTION;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 67650713985     PISSN: None     EISSN: 13480391     Source Type: Journal    
DOI: 10.1380/ejssnt.2009.199     Document Type: Conference Paper

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