SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B

Volumn 28, Issue 6, 2010, Pages

Fabrication and initial characterization of ultrahigh aspect ratio vias in gold using the helium ion microscope

(4) Scipioni, Larry a Ferranti, David C a Smentkowski, Vincent S b Potyrailo, Radislav A b

a Carl Zeiss Vision Inc USA (United States)

b GE GLOBAL RESEARCH (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; FOCUSED ION BEAMS; GOLD DEPOSITS; HELIUM; IONS; MILLING (MACHINING);

A-SPOTS; GOLD FILM; HELIUM ION; HIGH ASPECT RATIO; MEASUREMENTS OF; NANO-METER-SCALE; RATIO FEATURES; SENSING FEATURES; SPOT SIZES; ULTRAHIGH ASPECT RATIO;

ASPECT RATIO;

EID: 78650142188 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3517514 Document Type: Article

Times cited : (41)

References (15)

1
- 33646040126
- MIENEF 0167-9317,. 10.1016/j.mee.2006.01.166
- K. Shigeto, M. Kawamura, A. Yu. Kasumov, K. Tsukagoshi, K. Kono, and Y. Aoyagi, Microelectron. Eng. MIENEF 0167-9317 83, 1471 (2006). 10.1016/j.mee.2006.01.166
- (2006) Microelectron. Eng. , vol.83 , pp. 1471
- Shigeto, K.¹ Kawamura, M.² Kasumov, A.Yu.³ Tsukagoshi, K.⁴ Kono, K.⁵ Aoyagi, Y.⁶

2
- 78650077971
- Proceedings of Transducers 09 (IEEE, Denver, CO)
- R. A. Potyrailo, D. Monk, W. G. Morris, S. Klensmeden, H. Ehring, T. Wortley, V. Pizzi, J. Carter, and G. Gach, Proceedings of Transducers 09 (IEEE, Denver, CO, 2009), pp. 2378-2380.
- (2009) , pp. 2378-2380
- Potyrailo, R.A.¹ Monk, D.² Morris, W.G.³ Klensmeden, S.⁴ Ehring, H.⁵ Wortley, T.⁶ Pizzi, V.⁷ Carter, J.⁸ Gach, G.⁹

3
- 69949180381
- PSISDG 0277-786X.
- R. A. Potyrailo, K. Dovidenko, L. A. Le Tarte, C. Surman, and A. Pris, Proc. SPIE PSISDG 0277-786X 7322, 73220M1 (2009).
- (2009) Proc. SPIE , vol.7322
- Potyrailo, R.A.¹ Dovidenko, K.² Le Tarte, L.A.³ Surman, C.⁴ Pris, A.⁵

4
- 33846151395
- Light in tiny holes
- DOI 10.1038/nature05350, PII NATURE05350
- C. Genet and T. W. Ebbesen, Nature (London) NATUAS 0028-0836 445, 39 (2007). 10.1038/nature05350 (Pubitemid 46074988)
- (2007) Nature , vol.445 , Issue.7123 , pp. 39-46
- Genet, C.¹ Ebbesen, T.W.²

5
- 33750865920
- MIMIF7 1431-9276,. 10.1017/S1431927606069832
- K. Dovidenko, L. A. Le Tarte, and R. A. Potyrailo, Microsc. Microanal. MIMIF7 1431-9276 12, 206 (2006). 10.1017/S1431927606069832
- (2006) Microsc. Microanal. , vol.12 , pp. 206
- Dovidenko, K.¹ Le Tarte, L.A.² Potyrailo, R.A.³

6
- 34247276111
- FIB damage of Cu and possible consequences for miniaturized mechanical tests
- DOI 10.1016/j.msea.2007.01.046, PII S0921509307000597
- D. Kiener, C. Motz, M. Rester, M. Jenko, and G. Dehm, Mater. Sci. Eng., A MSAPE3 0921-5093 459, 262 (2007). 10.1016/j.msea.2007.01.046 (Pubitemid 46613471)
- (2007) Materials Science and Engineering A , vol.459 , Issue.1-2 , pp. 262-272
- Kiener, D.¹ Motz, C.² Rester, M.³ Jenko, M.⁴ Dehm, G.⁵

7
- 2542427614
- APPLAB 0003-6951,. 10.1063/1.1715142
- C. -M. Park, J. A. Bain, T. W. Clinton, P. A. A. van der Heijden, and T. J. Klemmer, Appl. Phys. Lett. APPLAB 0003-6951 84, 3331 (2004). 10.1063/1.1715142
- (2004) Appl. Phys. Lett. , vol.84 , pp. 3331
- Park, C.-M.¹ Bain, J.A.² Clinton, T.W.³ Van Der Heijden, P.A.A.⁴ Klemmer, T.J.⁵

8
- 48149105469
- BBIOE4 0956-5663,. 10.1016/j.bios.2008.03.044
- K. -L. Lee, W. -S. Wang, and P. -K. Wei, Biosens. Bioelectron. BBIOE4 0956-5663 24, 210 (2008). 10.1016/j.bios.2008.03.044
- (2008) Biosens. Bioelectron. , vol.24 , pp. 210
- Lee, K.-L.¹ Wang, W.-S.² Wei, P.-K.³

9
- 33750856812
- An introduction to helium ion microscopy
- DOI 10.1017/S1431927606069820, PII S1431927606069820
- J. Notte, R. Hill, S. McVey, L. Farkas, and B. Ward, Microsc. Microanal. MIMIF7 1431-9276 12, 126 (2006). 10.1017/S1431927606069820 (Pubitemid 44718771)
- (2006) Microscopy and Microanalysis , vol.12 , Issue.SUPPL. 2 , pp. 126-127
- Notte, J.¹ Hill, R.² McVey, S.³ Farkas, L.⁴ Percival, R.⁵ Ward, B.⁶

10
- 64249136210
- ALBYBL 0044-7749.
- M. Ananth, L. Scipioni, and J. Notte, Am. Lab. (Shelton, Conn.) ALBYBL 0044-7749 40, 42 (2008).
- (2008) Am. Lab. (Shelton, Conn.) , vol.40 , pp. 42
- Ananth, M.¹ Scipioni, L.² Notte, J.³

11
- 84905942350
- IMAGEJ 1.43d
- IMAGEJ 1.43d, http://rsb.info.nih.gov/ij

12
- 0007036807
- JVTBD9 1071-1023,. 10.1116/1.589643
- D. Santamore, K. Edinger, J. Orloff, and J. Melngailis, J. Vac. Sci. Technol. B JVTBD9 1071-1023 15, 2346 (1997). 10.1116/1.589643
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 2346
- Santamore, D.¹ Edinger, K.² Orloff, J.³ Melngailis, J.⁴

13
- 84905960693
- See supplementary material at E-JVTBD9-28-144006 for a video showing the breakthrough of this 20 nm wide via.
- See supplementary material at http://dx.doi.org/10.1116/1.3517514 E-JVTBD9-28-144006 for a video showing the breakthrough of this 20 nm wide via.

14
- 78650094587
- MIMIF7 1431-9276.
- L. Giannuzzi, Microsc. Microanal. MIMIF7 1431-9276 13, 1408 (2007).
- (2007) Microsc. Microanal. , vol.13 , pp. 1408
- Giannuzzi, L.¹

15
- 84905928986
- SRIM-2008, 03
- SRIM-2008, 03, http://www.srim.org/

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.