Ion beam irradiation induced fabrication of vertical coupling waveguides

Applied Physics Letters

Volumn 102, Issue 13, 2013, Pages

  Liang, H D ^a   Kumar, V S ^a   Wu, J F ^a   Breese, M B H ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM IRRADIATION; COUPLED WAVEGUIDES; COUPLING EFFICIENCY; HIGH ENERGY PROTON; HIGHER EFFICIENCY; ION BEAM IRRADIATION; SILICON-ON-INSULATOR PLATFORMS; VERTICAL COUPLING;

FABRICATION;

WAVEGUIDES;

EID: 84876151212     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4801307     Document Type: Article

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