Fabrication of large-area patterned porous silicon distributed Bragg reflectors

Optics Express

Volumn 16, Issue 17, 2008, Pages 12757-12803

  Mangaiyarkarasi, D ^a   Ow, Yueh Sheng ^a   Breese, Mark B H ^a   Fuh, Vincent L S ^b   Eric, Tang Xioasong ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BRAGG REFLECTORS; OPTICAL COMMUNICATION; REFLECTION; SILICON; SILICON WAFERS;

HIGH DEFINITION; HIGH-DENSITY ARRAYS; OPTICAL MICROCAVITIES; PATTERNED POROUS SILICONS; PHOTONIC COMPONENTS; REFLECTIVE DISPLAY; SILICON BRAGG REFLECTOR; UNIFORM DISTRIBUTION;

POROUS SILICON;

SILICON;

ARTICLE; CHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MATERIALS TESTING; POROSITY; RADIATION SCATTERING; REFRACTOMETRY;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; POROSITY; REFRACTOMETRY; SCATTERING, RADIATION; SILICON;

EID: 50049084950     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.012757     Document Type: Article

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