Design, tolerance analysis, and fabrication of silicon oxynitride based planar optical waveguides for communication devices

Journal of Lightwave Technology

Volumn 17, Issue 8, 1999, Pages 1401-1407

  Wörhoff, Kerstin ^a   Lambeck, Paul V ^a   Driessen, Alfred ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DENSITY (OPTICAL); FIBER OPTIC NETWORKS; FITS AND TOLERANCES; INSERTION LOSSES; LIGHT POLARIZATION; OPTICAL COMMUNICATION EQUIPMENT; SILICON NITRIDE;

FIBER TO CHIP COUPLING; INTEGRATION DENSITY; SILICON OXYNITRIDE;

OPTICAL WAVEGUIDES;

EID: 0141441179     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/50.779161     Document Type: Article

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